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US 10,670,741 B2Granted
Scintillator
AssigneeVarex Imaging Corporation
InventorsEduard Gillissen, Erik Jacobs, Nurcan Dogan
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Abstract
The present invention is in the field of an improved scintillator for X-rays, use of the inventive scintillator, an X-ray detector comprising the present scintillator, and a method of producing an improved scintillator. A scintillator converts X-rays into visible light; high performance scintillators are typically made of a crystalline material.
Claims20
A scintillator for X-rays, the scintillator comprising:
- a substrate plate layer;
- a first moisture barrier layer;
- and
- and a scintillator layer between the substrate plate layer and the first moisture barrier layer;
- and
- a levelling layer on the scintillator layer and between the scintillator layer and the first moisture barrier layer, wherein the levelling layer covers spaces defined by pillars of the scintillator layer;
- wherein the first moisture barrier layer has a thickness of between 10 nanometers (nm) and 1000 nm, and the first moisture barrier layer comprises two or more layers each individually having a thickness of between 0.5 nm and 100 nm wherein at least one subsequent layer is different from a previous layer.
4 more elements
A method of producing an improved scintillator, comprising the steps of:
- providing a substrate plate layer, and a scintillator layer,
- depositing a levelling layer on the scintillator layer, wherein the levelling layer covers spaces defined by pillars of the scintillator layer;
- and
- depositing a first hermetic moisture barrier layer over the levelling layer by using atomic layer deposition (ALD), wherein the scintillator layer is positioned between the substrate plate layer and the first hermetic moisture barrier layer and the first hermetic moisture barrier layer has a thickness of 10 nanometers (nm)-1000 nm, and the first moisture barrier layer comprises two or more layers each individually having a thickness of 0.5 nm-100 nm.
1 more element
Dependencies are inferred from the claim text.