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US 10,665,434 B2Granted
Slip ring, support mechanism, and plasma processing apparatus
AssigneeTokyo Electron Limited
InventorsKazuya Matsumoto, Takashi Yamamoto
Life of this patent
Estimating the term…
Abstract
Disclosed is a slip ring including: a conductive rotor that is rotatable around a rotation axis; a conductive stator provided coaxially with the rotor; a conductive sphere disposed between the rotor and the stator to form an electric path between the rotor and the stator; and a conductive coil spring provided between the sphere and one of the rotor and the stator and extending in a circumferential direction with respect to the rotation axis to be in contact with the sphere and one of the rotor and the stator.
Claims15
A slip ring comprising:
- a conductive rotor that is rotatable around a rotation axis;
- a conductive stator provided coaxially with the rotor;
- a plurality of conductive spheres disposed between the rotor and the stator to form an electric path between the rotor and the stator;
- a conductive coil spring provided between the plurality of conductive spheres and one of the rotor and the stator and extending in a circumferential direction with respect to the rotation axis to be in contact with the plurality of conductive spheres and one of the rotor and the stator, and
- a second conductive coil spring provided between the plurality of conductive spheres and a remaining one of the rotor and the stator and extending in a circumferential direction with respect to the rotation axis to be in contact with the plurality of conductive spheres and the remaining one of the rotor and the stator,
- wherein the electric path includes multiple point contacts between the coil spring and one of the rotor and the stator, multiple point contacts between the plurality of conductive spheres and the coil spring, multiple point contacts between the plurality of conductive spheres and the second coil spring, and multiple point contacts between the second coil spring and the remaining one of the rotor and the stator.
3 more elements
A slip ring comprising:
- a conductive rotor that is rotatable around a rotation axis;
- a conductive stator provided coaxially with the rotor;
- a plurality of conductive spheres disposed between the rotor and the stator to form an electric path between the rotor and the stator;
- a plurality of insulating retainers disposed adjacent to the plurality of conductive spheres, respectively and configured to separate a conductive sphere from another conductive sphere along a circumferential direction with respect to the rotation axis;
- a conductive coil spring provided between the plurality of conductive spheres and one of the rotor and the stator and extending in the circumferential direction with respect to the rotation axis to be in contact with the plurality of conductive spheres and one of the rotor and the stator;
- and
- a second conductive coil spring provided between the plurality of conductive spheres and a remaining one of the rotor and the stator and extending in a circumferential direction with respect to the rotation axis to be in contact with the plurality of conductive spheres and the remaining one of the rotor and the stator,
- wherein the electric path includes multiple point contacts between the coil spring and one of the rotor and the stator, multiple point contacts between the plurality of conductive spheres and the coil spring, multiple point contacts between the plurality of conductive spheres and the second coil spring, and multiple point contacts between the second coil spring and the remaining one of the rotor and the stator.
5 more elements
Dependencies are inferred from the claim text.