Method of performing electron diffraction pattern analysis upon a sample

A method for performing electron diffraction pattern analysis upon a sample, the method comprising performing the following steps in a vacuum chamber:

• a) isolating part of a specimen using a focused particle beam so as to form a sample;
• b) attaching a manipulator end effector to the sample so as to effect a predetermined orientation between the manipulator end effector and the sample;
• c) detaching the sample from the specimen and moving the sample clear of the specimen while the sample is fixed to the manipulator end effector at the predetermined orientation relative to the manipulator end effector;
• d) rotating the manipulator end effector about a rotation axis of the manipulator end effector to bring the sample into a predetermined geometry with respect to an electron beam and diffraction pattern imaging apparatus so as to enable an electron diffraction pattern to be obtained from the sample while the sample is still fixed to the manipulator end effector at the predetermined orientation relative to the manipulator end effector;
• and,
• e) causing said electron beam to impinge upon the sample attached to the manipulator end effector and obtaining said electron diffraction pattern, wherein the rotation axis of the manipulator end effector is at an angle to an electron beam axis of the electron beam of less than 90 degrees.