Single-drive rigid-flexible coupling precision motion platform and realization method and application thereof

A single-drive precision motion platform, comprising

• a machine base,
• a linear guide rail located on and connected to the machine base,
• a linear driver,
• a displacement sensor,
• a rigid frame located on the machine base and connected to the machine base through the linear guide rail so that the rigid frame is movable on the machine base,
• a plurality of flexible hinges, and
• a core motion platform attached to the linear driver;
• wherein the core motion platform is movable in a first direction of the linear guide rail under the action of the linear driver;
• wherein the first direction is the length direction of the linear guide rail;
• the plurality of flexible hinges are spaced parallelly in a second direction within the rigid frame, with the core motion platform being located at a center of the rigid frame;
• wherein the second direction is a width direction of the linear guide rail;
• a first end of each of the flexible hinges is secured to the rigid frame and a second end of each of the flexible hinges is secured to the core motion platform, so that a movement of the core motion platform makes the flexible hinges to generate elastic deformation;
• the displacement sensor is connected with the core motion platform and is used for measuring a displacement of the core motion platform in a motion direction;
• and
• the flexible hinges are straight beam type or notch type flexible hinges.