Reconfigurable allocation of VNCAP inter-layer vias for co-tuning of L and C in LC tank

A method of operating an LC tank oscillator, the method comprising the steps of:

• providing the LC tank oscillator comprising a capacitor and an inductor on the capacitor, the capacitor comprising:
• i) at least two metal layers, each metal layer having metal fingers that are interdigitated, wherein an orientation of the metal fingers alternates amongst the at least two metal layers, and ii) inter-layer vias interconnecting the at least two metal layers, wherein an inductance and a capacitance in the LC tank oscillator are tuneable;
• initiating oscillations in the LC tank oscillator;
• and
• inducing a net eddy current in the capacitor based on an arrangement of the inter-layer vias, whereby the net eddy current tunes inductance in the LC tank oscillator.

A method of co-tuning inductance and capacitance in an LC tank oscillator, the method comprising the steps of:

• forming the LC tank oscillator comprising:
• a capacitor having i) at least two metal layers, each metal layer having metal fingers that are interdigitated, wherein an orientation of the metal fingers alternates amongst the at least two metal layers, and ii) inter-layer vias interconnecting the at least two metal layers, and wherein the forming further comprises varying an arrangement of the inter-layer vias in an area between the at least two metal layers to co-tune both inductance and capacitance in the LC tank oscillator, wherein the arrangement of the inter-layer vias comprises one or more of a number and a location of the inter-layer vias;
• and
• forming an inductor on the capacitor.