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US 10,658,154 B2Granted
System and method for performing nano beam diffraction analysis
AssigneeInternational Business Machines Corporation
InventorsMarc Adam Bergendahl, James John Demarest, Christopher J. Penny, Roger Allen Quon, Christopher Joseph Waskiewicz
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Abstract
A system for performing diffraction analysis, includes a mill for removing a surface portion of a sample, and an analyzer for performing diffraction analysis on the milled sample.
Claims18
A system for performing diffraction analysis, comprising:
- a broad beam ion mill for removing a surface portion from plural parallel sides of a sample to expose an underlying surface of the sample;
- and
- an analyzer for performing diffraction analysis on the underlying surface of the sample.
A method of performing diffraction analysis, comprising:
- removing a surface portion from plural parallel sides of a sample using a broad beam ion mill to expose an underlying surface of the sample;
- and
- performing diffraction analysis on the underlying surface of the sample.
Dependencies are inferred from the claim text.