Shadowed grid structures for electrodes in vacuum electronics

A vacuum electronics device comprising:

• an electrically conductive substrate having a plurality of pillars patterned therein;
• a plurality of first grids disposed in a first plane above the plurality of pillars that are defined in the electrically conductive substrate;
• and
• a plurality of second grids disposed above the plurality of first grids in a second plane that is not co-planar with the first plane.

A vacuum electronics device comprising:

• an electrically conductive substrate having a plurality of pillars patterned therein;
• a plurality of first grid supports disposed on top of the plurality of pillars that are defined in the electrically conductive substrate and having a first width;
• a plurality of first electrically conductive grids disposed on top of the plurality of first grid supports and having a second width that is wider than the first width;
• a plurality of second grid supports disposed on top of the plurality of first grids and having a third width;
• and a plurality of second electrically conductive grids disposed on top of the plurality of second grid supports and having a fourth width that is wider than the third width.

A vacuum electronics device comprising:

• an electrically conductive substrate having a plurality of pillars patterned therein;
• a plurality of first grid supports disposed on top of the plurality of pillars that are defined in the electrically conductive substrate and having a first width;
• a plurality of first electrically conductive grids disposed on top of the plurality of first grid supports and having a second width that is wider than the first width;
• a plurality of second grid supports disposed on top of the plurality of first grids and having a third width;
• a plurality of second electrically conductive grids disposed on top of the plurality of second grid supports and having a fourth width that is wider than the third width;
• a plurality of third grid supports disposed on top of the plurality of second grids and having a fifth width;
• and
• a plurality of third electrically conductive grids disposed on top of the plurality of third grid supports and having a sixth width that is wider than the fifth width.