Measuring arrangement and method of directing and detecting particles

A measuring arrangement

• comprising:
• an electrostatic concentrator configured to direct particles to be verified toward a surface;
• an imaging sensor configured to detect the particles directed onto the surface;
• the electrostatic concentrator comprising a field electrode which is arranged in the surface or on the surface or adjacently to the surface and is configured to generate an inhomogeneous electrostatic field so as to direct the particles to be verified toward the surface;
• wherein the surface toward which the particles are directed is separated from the imaging sensor by one or more transparent layers;
• and
• the measuring arrangement comprising a shielding electrode configured to at least partly shield an electric field of the electrostatic concentrator off from the imaging electronics of the imaging sensor.

A measuring arrangement

• comprising:
• an electrostatic concentrator configured to direct particles to be verified toward a surface;
• an imaging sensor configured to detect the particles directed onto the surface;
• the electrostatic concentrator comprising a field electrode which is arranged in the surface or on the surface or adjacently to the surface and is configured to generate an inhomogeneous electrostatic field so as to direct the particles to be verified toward the surface:
• the measuring arrangement comprising several detection areas, a second one of the detection areas being configured to detect particles which have covered a larger distance through an electrostatic field generated by the electrostatic concentrator than particles detected by the first one of the detection areas;
• wherein the first detection area has a first electrode of the electrostatic concentrator associated with it which is configured to direct particles toward the first detection area,
• wherein the second detection area has a second electrode of the electrostatic concentrator associated with it which is configured to direct particles toward the second detection area,
• wherein an extension of the second electrode in a main direction of flow of the particles is larger than an extension of the first electrode in the main direction of flow of the particles.

A measuring arrangement

• comprising:
• an electrostatic concentrator configured to direct particles to be verified toward a surface;
• an imaging sensor configured to detect the particles directed onto the surface;
• the electrostatic concentrator comprising a field electrode which is arranged in the surface or on the surface or adjacently to the surface and is configured to generate an inhomogeneous electrostatic field so as to direct the particles to be verified toward the surface;
• and
• the measuring arrangement comprising a micromechanical element configured to enable detachment of particles adhering to the surface.

A measuring arrangement

• comprising:
• an electrostatic concentrator configured to direct particles to be verified toward a surface;
• an imaging sensor configured to detect the particles directed onto the surface;
• the electrostatic concentrator comprising a field electrode which is arranged in the surface or on the surface or adjacently to the surface and is configured to generate an inhomogeneous electrostatic field so as to direct the particles to be verified toward the surface;
• and
• the measuring arrangement being configured to temporarily generate an inhomogeneous electrostatic field whose field strength increases starting from the surface and which is configured to move particles away from the surface.

A method of detecting particles, comprising;

• directing particles to be verified toward a surface on the part of an electrostatic concentrator;
• detecting the particles directed onto the surface on the part of an imaging sensor;
• the electrostatic concentrator comprising a field electrode which is arranged in the surface or on the surface or adjacently to the surface, and generates an inhomogeneous electrostatic field so as to direct the particles to be verified toward the surface;
• and
• the method comprises temporarily generating an inhomogeneous electrostatic field whose field strength increases starting from the surface and which is configured to move particles away from the surface.