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AssigneeNational Institute of Advanced Industrial Science and Technology
InventorsQinghua Wang, Shien Ri, Hiroshi Tsuda
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In a conventional moiré method, achieving both measurement accuracy and dynamic measurement and balancing field of view and measurement accuracy have been difficult. The present invention makes it possible to handle conventional moiré fringes as a grating for generating phase-shifted second-order moiré fringes, use a spatial phase shift method algorithm to accurately analyze the phases of the second-order moiré fringes before and after deformation, and determine shape from the phase differences between gratings projected onto the surface of an object of measurement and a reference surface and determine deformation and strain from the phase differences between the second-order moiré fringes, before and after deformation, of a repeating pattern on the object surface or a produced grating. As a result, it is possible to measure the three-dimensional shape and deformation distribution of an object accurately and with a wide field of view or dynamically and with a high degree of accuracy.
A method for measuring a displacement distribution:
An apparatus for measuring a displacement distribution:
A computer program product stored in a non-transitory computer-readable medium that is programmed for measuring a displacement distribution to perform:
Dependencies are inferred from the claim text.