Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorsTetsuya Otsuki, Tsugio Ide
Life of this patent
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Abstract
A vibrator device includes a vibration element including a vibration portion and a fixed portion, a supporting member to which the fixed portion is attached to support the vibration element, and a first substrate to which the supporting member is attached, the supporting member includes a attaching portion attached to the first substrate, and A1≥A2 is satisfied in a case where an area of a rectangular region including the fixed portion is A1 and an area of a rectangular region including the attaching portion is A2 in a plan view seen from a thickness direction of the vibration element.
Claims19
A vibrator device comprising:
- a vibration element that includes a vibration member and a fixed member;
- a supporting member to which the fixed member is attached so as to support the vibration element;
- and
- a substrate having an attaching member, the supporting member being attached to the substrate via the attaching member,
- wherein A1≥A2 is satisfied when an area of a rectangular region including the fixed member is the A1 and an area of a rectangular region including the attaching member is the A2 in a plan view seen from a thickness direction of the vibration element, and
- wherein at least a part of the supporting member is made of the same material as the vibration element.
Dependencies are inferred from the claim text.