Six-degree-of-freedom linear motor

A linear motor with six degrees of freedom, comprising a magnet array and a coil group disposed above the magnet array, wherein the magnet array includes a first Halbach magnet array and a second Halbach magnet array, the first Halbach magnet array having a parallelogrammic cross section in a plane defined by an X-axis and a Y-axis, the first Halbach magnet array having a first side parallel to the Y-axis and a second side forming an angle of θ with the Y-axis, the second Halbach magnet array being in mirror symmetry with the first Halbach magnet array with respect to the Y-axis, and wherein the coil group includes a first coil group and a second coil group disposed above the first Halbach magnet array, and a third coil group and a fourth coil group disposed above the second Halbach magnet array, the first and second coil groups each having an axis inclined at the angle of θ with respect to the Y-axis, the first coil group being in mirror symmetry with the third coil group with respect to the Y-axis, the second coil group being in mirror symmetry with the fourth coil group with respect to the Y-axis,

• wherein the first Halbach magnet array comprises a plurality of Halbach units each consisting of four permanent magnets that are put together sequentially along the Y-axis and each having a third side parallel to the Y-axis and a fourth side forming the angle of θ with respect to the Y-axis.