Method of producing a plurality of laser diodes and laser diode
AssigneeOSRAM OLED GmbH
InventorSven Gerhard
Life of this patent
Estimating the term…
Abstract
A method of producing a plurality of laser diodes includes providing a plurality of laser bars in a compound, wherein the laser bars each include a plurality of laser diode elements arranged side by side, the laser diode elements each have a common substrate and a semiconductor layer sequence arranged on the substrate, and a splitting of the compound at a longitudinal separation line running between two adjacent laser bars in each case leads to formation of laser facets of the laser diodes to be produced, and structuring the compound at at least one longitudinal separation line, wherein a strained compensation layer is applied to the semiconductor layer sequence at least at the longitudinal separation line or the semiconductor layer sequence is at least partially removed.
Claims13
A method of producing a plurality of laser diodes comprising:
- providing a plurality of laser bars in a compound, wherein the laser bars each comprise a plurality of laser diode elements arranged side by side, the laser diode elements each have a common substrate and a semiconductor layer sequence arranged on the substrate, and a splitting of the compound at a longitudinal separation line running between two adjacent laser bars in each case leads to formation of laser facets of the laser diodes to be produced, and
- structuring the compound at least one longitudinal separation line, wherein a strained compensation layer is applied to the semiconductor layer sequence at least at the longitudinal separation line.
A method of producing a plurality of laser diodes comprising:
- providing a plurality of laser bars in a compound, wherein the laser bars each comprise a plurality of laser diode elements arranged side by side, the laser diode elements each have a common substrate and a semiconductor layer sequence arranged on the substrate, and a splitting of the compound at a longitudinal separation line running between two adjacent laser bars in each case leads to formation of laser facets of the laser diodes to be produced, and
- structuring the compound at at least one longitudinal separation line, wherein the semiconductor layer sequence is at least partially removed and recesses are produced by removing the semiconductor layer sequence in regions of the laser facets to be generated,
- the laser diode elements are each formed on a first main surface with a contact region, and the contact regions each extend into the recesses.
Dependencies are inferred from the claim text.