Laser apparatus including heat transfer device for releasing heat inside housing to the outside

A laser apparatus comprising:

• a laser resonator configured to oscillate a laser beam;
• a housing configured to seal a space in which the laser resonator is disposed in an airtight manner;
• a temperature sensor configured to detect temperature of air inside the housing;
• a humidity sensor configured to detect humidity of the air inside the housing;
• a heat transfer device including a high-temperature part, a low-temperature part at a temperature lower than that of the high-temperature part, the low-temperature part being disposed inside the housing, and a cooling fan configured to generate a flow of air in the low-temperature part, and configured to transfer heat in the low-temperature part to the high-temperature part;
• and
• a controller including an operation control unit configured to control the cooling fan and a storage unit configured to store predetermined information;
• wherein
• the storage unit stores a temperature reference value associated with temperature and a humidity reference value associated with humidity, for control of the cooling fan,
• the operation control unit performs control of varying rotation speed of the cooling fan in a predetermined cycle when temperature detected by the temperature sensor is lower than the temperature reference value and humidity detected by the humidity sensor is higher than the humidity reference value, and
• the operation control unit stops the control of varying rotation speed of the cooling fan in a predetermined cycle in at least one case among a case where temperature detected by the temperature sensor is higher than the temperature reference value and a case where humidity detected by the humidity sensor is lower than the humidity reference value.

A laser apparatus comprising:

• a laser resonator configured to oscillate a laser beam;
• a housing configured to seal a space in which the laser resonator is disposed in an airtight manner;
• a temperature sensor configured to detect temperature of air inside the housing;
• a humidity sensor configured to detect humidity of the air inside the housing;
• at least one fan configured to stir air in the housing;
• a heat transfer device including a high-temperature part and a low-temperature part at a temperature lower than that of the high-temperature part, the low-temperature part being disposed inside the housing, and configured to transfer heat in the low-temperature part to the high-temperature part;
• and
• a controller including an operation control unit configured to control the fan and a storage unit configured to store predetermined information;
• wherein
• the fan includes at least one of a stirring fan disposed at a position away from the heat transfer device and a cooling fan disposed in the heat transfer device so as to generate a flow of air in the low-temperature part,
• the storage unit stores a temperature reference value associated with temperature and a humidity reference value associated with humidity, for control of the fan,
• the operation control unit performs control of varying rotation direction of an impeller of at least one of the stirring fan and the cooling fan in a predetermined cycle when temperature detected by the temperature sensor is higher than the temperature reference value and humidity detected by the humidity sensor is lower than the humidity reference value, and
• the operation control unit stops the control of varying rotation direction of the impeller in the predetermined cycle in at least one case among a case where temperature detected by the temperature sensor is lower than the temperature reference value and a case where humidity detected by the humidity sensor is higher than the humidity reference value.

A laser apparatus comprising:

• a laser resonator configured to oscillate a laser beam;
• a housing configured to seal a space in which the laser resonator is disposed in an airtight manner;
• a temperature sensor configured to detect temperature of air inside the housing;
• a humidity sensor configured to detect humidity of the air inside the housing;
• a heat transfer device including a high-temperature part and a low-temperature part at a temperature lower than that of the high-temperature part, the low-temperature part being disposed inside the housing, and configured to transfer heat in the low-temperature part to the high-temperature part;
• a water storage part configured to store water generated in the low-temperature part due to condensation;
• a water storage sensor configured to detect an amount of water stored in the water storage part;
• a drain device configured to discharge the water stored in the water storage part to the outside of the housing;
• and
• a controller including an operation control unit configured to control the drain device and a storage unit configured to store predetermined information;
• wherein
• the storage unit stores a temperature reference value associated with temperature, a humidity reference value associated with humidity, and a stored-water-amount reference value associated with the amount of water stored in the water storage part, for control of the drain device,
• the operation control unit controls the drain device so as to drain water in the water storage part in a predetermined cycle when temperature detected by the temperature sensor is lower than the temperature reference value, and humidity detected by the humidity sensor is higher than the humidity reference value, and
• the operation control unit controls the drain device so as to drain water in the water storage part in a case where the amount of water in the water storage part exceeds the stored-water-amount reference value when temperature detected by the temperature sensor is higher than the temperature reference value and humidity detected by the humidity sensor is lower than the humidity reference value.

A laser apparatus comprising:

• a laser resonator configured to oscillate a laser beam;
• a housing configured to seal a space in which the laser resonator is disposed in an airtight manner;
• a plurality of temperature sensors each configured to detect temperature of air inside the housing;
• at least one fan configured to stir the air inside the housing;
• a heat transfer device including a high-temperature part and a low-temperature part at a temperature lower than that of the high-temperature part, the low-temperature part being disposed inside the housing, and configured to transfer heat in the low-temperature part to the high-temperature part;
• and
• a controller including an operation control unit configured to control the fan and a storage unit configured to store predetermined information;
• wherein
• the fan includes at least one of a stirring fan disposed at a position away from the heat transfer device, and a cooling fan disposed in the heat transfer device so as to generate a flow of air in the low-temperature part,
• the plurality of temperature sensors are disposed at respective positions away from each other inside the housing,
• the storage unit stores a temperature-distribution reference value with respect to a variable associated with temperature distribution inside the housing, and
• the operation control unit calculates the variable associated with temperature distribution on the basis of temperatures detected by the plurality of temperature sensors, controls at least one of the stirring fan and the cooling fan so as to operate when the variable associated with temperature distribution is more than the temperature-distribution reference value, and controls at least one of the stirring fan and the cooling fan so as to be stopped when the variable associated with temperature distribution is less than the temperature-distribution reference value.

A laser apparatus comprising:

• a laser resonator configured to oscillate a laser beam;
• a housing configured to seal a space in which the laser resonator is disposed in an airtight manner;
• a plurality of humidity sensors each configured to detect humidity of air inside the housing;
• at least one fan configured to stir the air inside the housing;
• a heat transfer device including a high-temperature part and a low-temperature part at a temperature lower than that of the high-temperature part, the low-temperature part being disposed inside the housing, and configured to transfer heat in the low-temperature part to the high-temperature part;
• and
• a controller including an operation control unit configured to control the fan and a storage unit configured to store predetermined information;
• wherein
• the fan includes at least one of a stirring fan disposed at a position away from the heat transfer device, and a cooling fan disposed in the heat transfer device so as to generate a flow of air in the low-temperature part,
• the plurality of humidity sensors is disposed at respective positions away from each other inside the housing,
• the storage unit stores a humidity-distribution reference value with respect to a variable associated with humidity distribution inside the housing, and
• the operation control unit calculates the variable associated with humidity distribution on the basis of relative humidity detected by the plurality of humidity sensors, and controls at least one of the stirring fan and the cooling fan so as to operate when the variable associated with humidity distribution is more than the humidity-distribution reference value, and controls at least one of the stirring fan and the cooling fan so as to be stopped when the variable associated with humidity distribution is less than the humidity-distribution reference value.