Microwave device

A microwave device, comprising:

• a first substrate having a first surface;
• a first metal layer disposed on the first surface and having a plurality of openings;
• a second substrate having a second surface corresponding to the first substrate, wherein the second surface is adjacent to the first surface;
• a second metal layer disposed on the second surface, wherein the second metal layer comprises a plurality of electrodes corresponding to the openings, and at least one modulation zone is between the electrodes and the first metal layer in a stacking direction, and the modulation zone has a first spacing distance d;
• a sealing element located between the first substrate and the second substrate, wherein an active zone is formed by a space between the sealing element, the first substrate, and the second substrate;
• a modulation material filled in the active zone;
• and
• at least one fill material disposed in the active zone, a thickness of the fill material is greater than 0.3 μm and less than a height of the sealing element, wherein the active zone on the first surface has a projection area of A, and a volume of the fill material divided by (A*d) is in a range from 0.02 to 0.86.

A microwave device, comprising:

• a first substrate having a first surface;
• a first metal layer disposed on the first surface and having a plurality of openings;
• a second substrate having a second surface corresponding to the first substrate, wherein the second surface is adjacent to the first surface;
• a second metal layer disposed on the second surface, wherein the second metal layer comprises a plurality of electrodes corresponding to the openings, and a modulation zone is between the electrodes and the first metal layer in a stacking direction;
• a sealing element located between the first substrate and the second substrate, wherein an active zone is formed by a space between the sealing element, the first substrate, and the second substrate;
• a modulation material filled in the active zone;
• and
• a fill material disposed between the first substrate and the second substrate;
• wherein the active zone has a projection area A on the first surface, the modulation zone has a spacing distance d, and a volume of the modulation material divided by (A*d) is in a range from 0.14 to 0.98.