Memory devices and methods of forming the same
AssigneeGlobalfoundries Singapore Pte. Ltd.
InventorsCurtis Chun-I Hsieh, Wei-Hui Hsu, Wanbing Yi, Yi Jiang, Juan Boon Tan
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AssigneeGlobalfoundries Singapore Pte. Ltd.
InventorsCurtis Chun-I Hsieh, Wei-Hui Hsu, Wanbing Yi, Yi Jiang, Juan Boon Tan
Estimating the term…
In a non-limiting embodiment, a device may be formed having a substrate that has at least a first region. A base dielectric layer is arranged over the substrate. The base dielectric layer includes an interconnect in the first region. A first electrode is arranged over the interconnect in the first region. A mask structure is arranged over the first electrode. At least one spacer stack is arranged at least partially around the mask structure and the first electrode. The spacer stack(s) includes a resistive switching element at least partially lining sidewalls of the mask structure and the first electrode, and a second electrode arranged over the resistive switching element.
A device comprising:
A method of forming a device, comprising:
Dependencies are inferred from the claim text.