Optoelectronic device and method for manufacturing same
AssigneesAledia, Centre National De La Recherche Scientifique
InventorsBenoît Amstatt, Sylvia Scaringella, Jesus Zuniga-Perez
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Abstract
An optoelectronic device including first and second active regions suitable for emitting or detecting electromagnetic radiation and containing a first semiconductor material that predominantly contains a first compound selected from Compounds III-V, Compounds II-VI, and mixtures of same. The first active regions have a first polarity, and the second active regions have a second polarity different from the first polarity.
Claims11
A method of manufacturing an optoelectronic device comprising forming first and second active regions capable of emitting or receiving an electromagnetic radiation made of at least one first semiconductor material mainly comprising a first compound selected from III-V compounds, II-VI compounds, and mixtures thereof, the first active regions having a first polarity and the second active regions having a second polarity different from the first polarity,
- wherein the method comprises the steps of:
- forming, on a substrate, third portions of a third semiconductor material having a third polarity and fourth portions of the third semiconductor material having a fourth polarity different from the third polarity, the third material being a nitride, a carbide, or a boride of a transition metal of column IV, V, or VI, or a combination of these compounds;
- forming on the third portions first semiconductor portions of a second semiconductor material mainly comprising the first compound and having the first polarity and, on the fourth portions, second semiconductor portions of the second semiconductor material having the second polarity;
- and
- growing by simultaneous epitaxy the first active regions in contact with the first semiconductor portions and the second active regions in contact with the second semiconductor portions.
Dependencies are inferred from the claim text.