Semiconductor light emitting device and method of fabricating the same

A method of forming a semiconductor light-emitting device, comprising:

• providing a first substrate;
• forming a sacrificial layer on the first substrate;
• adhering a plurality of epitaxial units to the first substrate with a first adhesive layer, wherein the plurality of epitaxial units has a surface facing the first substrate and the sacrificial layer is between the first substrate and the first adhesive layer;
• adhering a second substrate to the plurality of epitaxial units;
• illuminating the sacrificial layer for transferring a portion of the plurality of epitaxial units from the first substrate to the second substrate, wherein a portion of the first adhesive layer remains on the portion of the plurality of epitaxial units;
• and
• removing the portion of the first adhesive layer by dry etching or wet etching from the portion of the plurality of epitaxial units.