Optical sensor structure and method for forming the same
AssigneeVanguard International Semiconductor Corporation
InventorsHsin-Hui Lee, Han-Liang Tseng, Hsueh-Jung Lin
Life of this patent
Estimating the term…
Abstract
An optical sensor structure is provided. The optical sensor structure includes a sensor pixel array in a substrate, a light collimating layer on the substrate, and at least one through-substrate via. The sensor pixel array has a plurality of sensor pixels. The at least one through-substrate via extends from a first surface to an opposite second surface of the substrate. The at least one through-substrate via is in the sensor pixel array and vertically misaligned with the plurality of sensor pixels.
Claims20
An optical sensor structure, comprising:
- a sensor pixel array in a substrate, wherein the sensor pixel array has a plurality of sensor pixels;
- a light collimating layer on the substrate;
- and
- at least one through-substrate via extending from a first surface to an opposite second surface of the substrate, wherein the at least one through-substrate via is in the sensor pixel array and is vertically misaligned with the plurality of sensor pixels.
A method for forming an optical sensor structure, comprising:
- forming at least one through-substrate via in a substrate;
- forming a sensor pixel array in the substrate, wherein the sensor pixel array has a plurality of sensor pixels, and wherein the at least one through-substrate via is in the sensor pixel array and vertically misaligned with the plurality of sensor pixels;
- and
- forming a light collimating layer on the substrate.
Dependencies are inferred from the claim text.