3D circuit transistors with flipped gate
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsFrancois Andrieu, Perrine Batude, Maud Vinet
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Abstract
An integrated circuit is provided with several superimposed levels of transistors, the circuit including an upper level provided with transistors having a rear gate electrode laid out on a first semiconducting layer, and a second semiconducting layer, a first transistor among the transistors of the upper level being provided with a contact pad traversing the second semiconducting layer, the contact pad being connected to a connection zone disposed between the first semiconducting layer and the second semiconducting layer, the first transistor being polarised by and connected to at least one power supply line disposed on a side of a front face of the second semiconducting layer that is opposite to the rear face.
Claims12
An integrated circuit provided with several superimposed levels of transistors, the integrated circuit comprising:
- a lower level including at least a transistor having a channel region formed in a first semiconducting layer resting on a substrate;
- and
- an upper level, disposed above the lower level and provided with transistors having respective channel regions formed in zones that are unconnected and insulated from each other, the zones comprising a second semiconducting layer disposed above the first semiconducting layer and covered with a dielectric material, each zone comprising a gate electrode disposed on a rear face of the second semiconducting layer and disposed between the first semiconducting layer and the second semiconducting layer, the rear face being parallel to a plane of an interface between the lower level and the upper level,
- wherein a first transistor among the transistors of the upper level is provided with a source or drain contact pad traversing the second semiconducting layer, the contact pad being connected to a connection zone disposed between the first semiconducting layer and the second semiconducting layer, the first transistor being biased by and connected to at least one power supply line disposed on a side of a front face of the second semiconducting layer, the front face being parallel to the rear face and disposed opposite to the rear face.
Dependencies are inferred from the claim text.