Semiconductor device and method for manufacturing same
AssigneeToshiba Memory Corporation
InventorShinya Arai
Life of this patent
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Abstract
According to one embodiment, a source layer includes a semiconductor layer including an impurity. A stacked body includes a plurality of electrode layers stacked with an insulator interposed. A gate layer is provided between the source layer and the stacked body. The gate layer is thicker than a thickness of one layer of the electrode layers. A semiconductor body extends in a stacking direction of the stacked body through the stacked body and the gate layer. The semiconductor body further extends in the semiconductor layer where a side wall portion of the semiconductor body contacts the semiconductor layer. The semiconductor body does not contact the electrode layers and the gate layer.
Claims15
A semiconductor device, comprising:
- a substrate including a control circuit, the control circuit provided at a surface of the substrate;
- a source layer including a semiconductor layer provided above the control circuit and including an impurity;
- a stacked body provided above the source layer, the stacked body including a plurality of electrode layers stacked with an insulator interposed;
- a gate layer provided between the source layer and the stacked body, the gate layer being thicker than a thickness of one layer of the electrode layers;
- a semiconductor body extending in a stacking direction of the stacked body through the stacked body and the gate layer, the semiconductor body further extending in the semiconductor layer where a side wall portion of the semiconductor body contacts the semiconductor layer, the semiconductor body not contacting the electrode layers and the gate layer;
- and
- a charge storage portion provided between the semiconductor body and one of the electrode layers,
- wherein an impurity concentration of the side wall portion of the semiconductor body is higher than another impurity concentration of a portion of the semiconductor body opposing the stacked body.
Dependencies are inferred from the claim text.