Using identifiers to map edge ring part numbers onto slot numbers
AssigneeLam Research Corporation
InventorsEvelio Sevillano, Thomas Chang, Robert O'Donnell, Ronda Ropes, Peter R. Wassei, Bridget Hill
Life of this patent
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Abstract
Methods and systems for tracking an edge ring includes capturing an edge ring identifier from a source related to the edge ring. The edge ring is inserted into a slot of an edge ring carrier, wherein the edge ring is being assigned to the edge ring carrier. The edge ring identifier is tracked to determine transfers into and out of the edge ring carrier and into and out of a processing station. The tracking of the edge ring identifier builds a metadata file that provides lifetime information regarding the edge ring.
Claims21
A method for tracking an edge ring, comprising:
- capturing an edge ring identifier from a source related to the edge ring;
- inserting the edge ring to a slot of an edge ring carrier, the edge ring being assigned to the edge ring carrier;
- and
- tracking the edge ring identifier for transfers into and out of the edge ring carrier and into and out of a processing station,
- wherein tracking of the edge ring identifier builds a metadata file that provides lifetime information regarding the edge ring.
A system for tracking an edge ring, comprising:
- an edge ring execution system configured to track the edge ring within the system, the edge ring execution system interacting with,
- an edge ring tracking module to receive an edge ring identifier of the edge ring when the edge ring is received into the system and loaded onto an edge ring carrier, the edge ring assigned to the edge ring carrier;
- an edge ring carrier tracking module to track a location of the edge ring carrier as the edge ring carrier moves within the system, information provided by the edge ring carrier tracking module used to determine a current location of the edge ring within the system;
- and
- a manufacturing execution system configured to provide information of the edge ring as the edge ring is moved into and out of the edge ring carrier and into and out of a processing station within the system, the information provided by the manufacturing execution system used by the edge ring execution system to build a metadata file for the edge ring, wherein the metadata file provides lifetime information of the edge ring within the system.
Dependencies are inferred from the claim text.