Semiconductor device and method for manufacturing same
AssigneeMitsubishi Electric Corporation
InventorsNoriaki Tsuchiya, Yosuke Setoguchi
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Abstract
A method for manufacturing a semiconductor device according to the present invention includes a manufacturing step of forming a plurality of unit regions each having a plurality of first regions serving as effective cells in which main current flows, and a second region that has an appearance different from that of the first regions and serves as an ineffective cell in which no main current flows, and an appearance inspection step including a step of imaging the unit region to obtain a captured image, a step of cutting out an inspection image from the captured image based on a position of an alignment pattern containing the second region, and a step of comparing the inspection image with a reference image.
Claims14
A method for manufacturing a semiconductor device comprising:
- a manufacturing step of forming a plurality of unit regions each having a plurality of first regions serving as effective cells in which main current flows, and a second region that has an appearance different from that of the first regions and serves as an ineffective cell in which no main current flows, and
- an appearance inspection step including a step of imaging the unit region to obtain a captured image, a step of cutting out an inspection image from the captured image based on a position of an alignment pattern containing the second region, and a step of comparing the inspection image with a reference image.
A semiconductor device comprising:
- a plurality of unit regions each having a plurality of effective cells in which main current flows, and an ineffective cell that has an appearance different from that of the effective cells and in which no main current flows, wherein
- the unit region has a plurality of adjacent ineffective cells, each adjacent ineffective cell of the plurality of adjacent ineffective cells sharing at least one side with another of the plurality of adjacent ineffective cells, and
- the plurality of adjacent ineffective cells form an alignment pattern.
Dependencies are inferred from the claim text.