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US 10,651,084 B1Granted
Microelectronic devices comprising manganese-containing conductive structures, and related electronic systems and methods
AssigneeMicron Technology, Inc.
InventorKentaro Ishii
Life of this patent
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Abstract
A microelectronic device comprises a first conductive material comprising copper, a conductive plug comprising tungsten in electrical communication with the first conductive material, and manganese particles dispersed along an interface between the first conductive material and the conductive plug. Related electronic systems and related methods are also disclosed.
Claims29
A microelectronic device, comprising:
- a first conductive material comprising copper;
- a conductive plug comprising tungsten in electrical communication with the first conductive material;
- and
- manganese particles dispersed along an interface between the first conductive material and the conductive plug.
1 more element
An electronic system, comprising:
- an input device;
- an output device;
- a processor device operably coupled to the input device and the output device;
- and
- a memory device operably coupled to the processor device and comprising:
- a first conductive material within a first dielectric material;
- a second conductive material adjacent to the first conductive material and within a second dielectric material adjacent to the first conductive material;
- at least a first barrier material between the first conductive material and the second conductive material;
- and
- manganese particles within the first conductive material and adjacent to the first barrier material.
7 more elements
An electronic device, comprising:
- a copper interconnection;
- a tungsten plug in direct contact with a portion of the copper interconnection;
- and
- manganese particles segregated in the copper interconnection around the portion of the copper interconnection.
1 more element
A method of forming a microelectronic device, the method comprising:
- forming openings in a first dielectric material;
- forming a first barrier material within the openings in the first dielectric material;
- forming a seed material comprising copper and manganese on the first barrier material;
- forming a first conductive material on the seed material;
- forming a second dielectric material on the first dielectric material and the first conductive material;
- forming additional openings in the second dielectric material;
- forming a second barrier material within the additional openings in the second dielectric material;
- forming a second conductive material on the second barrier material;
- and
- segregating at least some of the manganese of the seed material to a location proximate an interface between the first conductive material and the second barrier material.
7 more elements
Dependencies are inferred from the claim text.