Substrate processing apparatus and method of manufacture using the same

A substrate processing apparatus, comprising:

• a substrate jig device;
• and
• a transfer unit comprising at least one floating chuck and a transfer driving unit,
• wherein the at least one floating chuck is configured to hold a substrate in a non-contact state, and
• the transfer driving unit is configured to transfer the at least one floating chuck toward the substrate jig device,
• wherein the substrate jig device comprises:
• a supporter with an opening, the supporter having a ring shape;
• and
• a suction unit comprising a plurality of suction parts that overlap with the opening and are configured to move toward the opening,
• wherein the suction parts comprise:
• a first suction part configured to move in a first direction and to hold a center region of the substrate transferred by the transfer unit, the first direction being a direction penetrating the opening;
• and
• a plurality of second suction parts configured to move toward the opening and to hold an edge region of the substrate transferred by the transfer unit.