Sample transfer system and solar cell production method

A sample transfer system comprising:

• a sample-mounting member mounting a plurality of samples thereonto;
• and
• a sample-moving device lifting the samples to move the samples between the sample-mounting member and another location,
• wherein the sample-mounting member comprises:
• a plurality of predetermined sample-mounting regions mounting the samples,
• wherein each of the sample-mounting regions comprises one or more recessed parts on or around a side of the predetermined sample-mounting region,
• wherein the sample-moving device comprises a plurality of sample-holding devices, each sample-holding device comprising:
• a sample-holding surface facing the sample to be lifted;
• one or more contact members each contacting with the sample, wherein each of the contact members comprises a portion suspended in a Z direction vertical to the sample-holding surface;
• and
• one or more movement mechanisms moving the contact member in an X direction or a Y direction along the sample-holding surface, wherein each movement mechanism holds the one or more contact members, and wherein the X and Y directions are perpendicular to each other and parallel to the sample holding surface,
• wherein the sample-moving device further comprises a traveling rail extending in the Y direction and a guide that moves on the traveling rail, and
• wherein the guide lifts and lowers the plurality of the sample-holding devices in the Z direction and moves with the plurality of the sample-holding devices in the Y direction,
• wherein the plurality of the sample-holding devices are linearly arranged and connected in series in the X direction parallel to the sample-holding surface,
• wherein each of the sample-holding devices generates negative pressure by making a gas flow between the sample-holding surface and the sample to suck the sample toward the sample-holding surface by the negative pressure, and holds the sample at a position in proximity to the sample-holding surface,
• wherein the suspended portion of each of the contact members enters each of the recessed parts when the sample-holding device is brought in proximity to the predetermined sample-mounting region, the suspended portion of the contact member moving within the recessed part by operating the movement mechanism to correct an orientation of the sample on the sample-mounting member, and
• wherein the contact member is a pin and the recessed part is a slot.