US 10,651,062 B2Granted

Substrate treating apparatus

AssigneeSCREEN Holdings Co., Ltd.

InventorsYasuhiro Fukumoto, Yuji Tanaka, Tomohiro Matsuo, Takeharu Ishii

Life of this patent

Estimating the term…

Loading patent…

Abstract

Disclosed is a substrate treating apparatus including a treatment container, a pin, a seal housing, a seal member, and an exhaust port. The treatment container includes an opening. The pin is disposed between an interior of the treatment container and an exterior of the treatment container through the opening, and is configured to reciprocate along an axis thereof. The seal housing is disposed in the exterior of the treatment container. The seal housing is in close contact with the treatment container around the opening, and accommodates a part of the pin. The seal member is in close contact with an inner peripheral surface of the seal housing, and in close contact with an outer peripheral surface of the pin so as to be slidable relative to the pin. The exhaust port is in connection with the seal housing in a communicated manner.

Claims23

Dependent claims

A substrate treating apparatus, comprising:

a treatment container configured to treat a substrate, the treatment container having:
a casing;
a lid removably attached to the casing;
a transportation port through which the substrate is passed;
a shutter for opening and closing the transportation port;
and
a first opening;
a first shaft member that is disposed between an interior of the treatment container and an exterior of the treatment container through the first opening, and that is configured to reciprocate in an axis direction of the first shaft member;
a first seal housing that is disposed in the exterior of the treatment container, that is in close contact to the treatment container around the first opening, and that accommodates a part of the first shaft member,
a first seal member that is in close contact with an inner peripheral surface of the first seal housing, and that is in close contact with an outer peripheral surface of the first shaft member so as to be slidable relative to the first shaft member;
and
a first exhaust port that is in connection with the first seal housing in a communicated manner, and that is configured to exhaust gas within the first seal housing.

9 more elements

A substrate treating apparatus, comprising:

a treatment container configured to treat a substrate, the treatment container having:
a casing;
a lid removably attached to the casing;
a transportation port through which the substrate is passed;
a shutter for opening and closing the transportation port;
and
a first opening;
a first shaft member that is disposed between an interior of the treatment container and an exterior of the treatment container through the first opening, and that is configured to reciprocate in an axis direction of the first shaft member;
a sealing mechanism configured to seal the first opening while allowing reciprocation of the first shaft member;
and
a cooling unit that is disposed in the exterior of the treatment container and adjacent to the sealing mechanism, and that is configured to cool the sealing mechanism, wherein
the sealing mechanism comprises:
a first seal housing that is disposed in the exterior of the treatment container, that is in close contact with the treatment container around the first opening, and that accommodates a part of the first shaft member;
and
a first seal member that is in close contact with an inner peripheral surface of the first seal housing, and that is in close contact with an outer peripheral surface of the first shaft member so as to be slidable relative to the first shaft member.

12 more elements

A substrate treating apparatus, comprising:

a treatment container configured to treat a substrate, the treatment container having:
a casing;
a lid removably attached to the casing;
a transportation port through which the substrate is passed;
a shutter for opening and closing the transportation port;
a first opening;
and
a second opening;
a first shaft member that is disposed between an interior of the treatment container and an exterior of the treatment container through the first opening, and that is configured to reciprocate in an axis direction of the first shaft member;
a second shaft member that is disposed between the interior of the treatment container and the exterior of the treatment container through the second opening, and that is configured to reciprocate in an axis direction of the second shaft member;
and
a sealing mechanism configured to seal the first opening while allowing reciprocation of the first shaft member, wherein
the sealing mechanism comprises:
a first seal housing that is disposed in the exterior of the treatment container, that is in close contact with the treatment container around the first opening, that accommodates a part of the first shaft member, that is in close contact with the treatment container around the second opening, and that accommodates a part of the second shaft member;
a first seal member that is in close contact with an inner peripheral surface of the first seal housing, and that is in close contact with an outer peripheral surface of the first shaft member so as to be slidable relative to the first shaft member;
and
a second seal member that is in close contact with an inner peripheral surface of the first seal housing, and is in close contact with an outer peripheral surface of the second shaft member so as to be slidable relative to the second shaft member,
the first seal housing includes:
a collector that is in close contact with the treatment container around the first opening and the second opening;
a first cylinder that is in connection with the collector in a communicated manner;
and
a second cylinder that is in connection with the collector in a communicated manner,
a part of the first shaft member is accommodated into the collector and the first cylinder,
a part of the second shaft member is accommodated into the collector and the second cylinder,
the first seal member is in close contact with an inner peripheral surface of the first cylinder, and
the second seal member is in close contact with an inner peripheral surface of the second cylinder.

23 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/904,559Filed 26 Feb 2018
Priority: JP 2017-05151616 Mar 2017
Published: US 2018/0269084 A120 Sep 2018
Granted: 12 May 2020
Term ends: Not estimatedThe source records don’t support an estimate.

Classification17 codes

H10P 72/0434
Apparatus for thermal treatment: mainly by convection
B05C 11/00
Component parts, details or accessories not specifically provided for in groups b05c1/00
F16J 15/002
Sealings: comprising at least two sealings in succession
F16J 15/3268
With elastic sealings, e.g. O-rings: mounting of sealing rings