Treating liquid vaporizing apparatus
AssigneeSCREEN Holdings Co., Ltd.
InventorsAtsushi Tanaka, Yukihiko Inagaki, Koji Nishi, Shigehiro Goto, Toru Momma
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Abstract
A treating liquid vaporizing apparatus includes a buffer tank for storing a treating liquid, a vaporizing container connected to the buffer tank for vaporizing the treating liquid, a further vaporizing container connected to the buffer tank in parallel with the vaporizing container for vaporizing the treating liquid, a switch valve for opening and closing a flow path of the treating liquid between the buffer tank and the vaporizing container, and a switch valve for opening and closing a flow path of the treating liquid between the buffer tank and the further vaporizing container.
Claims19
A treating liquid vaporizing apparatus comprising:
- a tank for storing a treating liquid;
- a first vaporizing container connected to the tank for vaporizing the treating liquid;
- a second vaporizing container connected to the tank in parallel with the first vaporizing container for vaporizing the treating liquid;
- a first treating liquid valve for opening and closing a flow path of the treating liquid between the tank and the first vaporizing container;
- and
- a second treating liquid valve for opening and closing a flow path of the treating liquid between the tank and the second vaporizing container, wherein
- the tank has an interior thereof opened to an exterior of the tank;
- the treating liquid vaporizing apparatus comprising:
- a first vent valve for opening and closing an interior of the first vaporizing container to an exterior of the first vaporizing container;
- and
- a second vent valve for opening and closing an interior of the second vaporizing container to an exterior of the second vaporizing container.
A treating liquid vaporizing apparatus comprising:
- a tank for storing a treating liquid;
- a first vaporizing container connected to the tank for vaporizing the treating liquid;
- a second vaporizing container connected to the tank in parallel with the first vaporizing container for vaporizing the treating liquid;
- a first treating liquid valve for opening and closing a flow path of the treating liquid between the tank and the first vaporizing container;
- a second treating liquid valve for opening and closing a flow path of the treating liquid between the tank and the second vaporizing container;
- wherein
- a treating gas produced in the first vaporizing container is sent only to a first treating unit;
- and
- a treating gas produced in the second vaporizing container is sent only to a second treating unit;
- the treating liquid vaporizing apparatus further comprising:
- a first vent valve for opening and closing an interior of the first vaporizing container to an exterior of the first vaporizing container;
- and
- a second vent valve for opening and closing an interior of the second vaporizing container to an exterior of the second vaporizing container.
Dependencies are inferred from the claim text.