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US 10,651,031 B2Granted
Tantalum compound
AssigneesSamsung Electronics Co., Ltd., Adeka Corporation
InventorsSeung-min Ryu, Takanori Koide, Naoki Yamada, Jae-soon Lim, Tsubasa Shiratori, Youn-joung Cho
Life of this patent
Estimating the term…
Abstract
A tantalum compound, a method of forming a thin film, and a method of fabricating an integrated circuit device, the tantalum compound being represented by the following General Formula (I):
Claims20
A tantalum compound represented by the following General Formula (I):
- wherein, in General Formula 1,
- R1, R3, and R4 are each independently a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group;
- and
- R2 is a hydrogen atom, a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group.
1 more element
A tantalum compound including following group:
- wherein the symbol “*” represents a binding site,
- R1 is a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C4 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group;
- and
- R2 is a hydrogen atom, a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C6 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group.
1 more element
A tantalum compound represented by the following General Formula (I):
- wherein, in General Formula 1,
- R1, R3, and R4 are each independently a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C4 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group;
- and
- R2 is a hydrogen atom, a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C6 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group.
1 more element
Dependencies are inferred from the claim text.