Detachable gas injector used for semiconductor equipment
AssigneeHermes-Epitek Corporation
InventorsTsan-Hua Huang, Chia-Ying Lin
Life of this patent
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Abstract
A detachable gas injector adaptable to semiconductor equipment includes a top cover, a hollow sleeve, a top housing and a gas output unit. The hollow sleeve receives a convex part of the top cover, thus forming a first transmission passage between the hollow sleeve and the convex part. The top housing has a center hole for accommodating the hollow sleeve, thus forming a second transmission passage between the hollow sleeve and the center hole. The gas output unit is connected to a bottom surface of the hollow sleeve. The gas output unit includes a first partition plate and a second partition plate, which form a first gas output layer, a second gas output layer and a third gas output layer.
Claims20
A detachable gas injector adaptable to semiconductor equipment, comprising:
- a top cover having a first air intake passage, a second air intake passage and a third air intake passage for inputting a first reaction gas, a second reaction gas and a third reaction gas respectively, the top cover having a convex part disposed at the bottom of the top cover, through which the third air intake passage passes;
- a hollow sleeve that receives the convex part, a top surface of the hollow sleeve being connected to a bottom surface of the top cover, thus forming a first transmission passage between an inner side wall of the hollow sleeve and an outer side wall of the convex part, the first transmission passage communicating with the first air intake passage;
- a top housing having a center hole for accommodating the hollow sleeve, a cover surface of the top cover being disposed on a top surface of the top housing, thus forming a second transmission passage between an outer side wall of the hollow sleeve and an inner side wall of the center hole, the second transmission passage communicating with the second air intake passage;
- and a gas output unit connected to a bottom surface of the hollow sleeve, the gas output unit including a first partition plate and a second partition plate, which form a first gas output layer, a second gas output layer and a third gas output layer for outputting the second reaction gas, the first reaction gas and the third reaction gas respectively.
A detachable gas injector adaptable to semiconductor equipment, comprising:
- a top cover having a first air intake passage, a second air intake passage and a third air intake passage for inputting a first reaction gas, a second reaction gas and a third reaction gas respectively, the top cover having a convex part disposed at the bottom of the top cover, through which the third air intake passage passes;
- a first hollow sleeve that receives the convex part, a top surface of the first hollow sleeve being connected to a bottom surface of the top cover, thus forming a first transmission passage between an inner side wall of the first hollow sleeve and an outer side wall of the convex part, the first transmission passage communicating with the first air intake passage;
- a second hollow sleeve that receives the first hollow sleeve, a top surface of the second hollow sleeve being connected to the bottom surface of the top cover, thus forming a second transmission passage between an inner side wall of the second hollow sleeve and an outer side wall of the first hollow sleeve, the second transmission passage communicating with the second air intake passage;
- atop housing having a centerhole for accommodating the second hollow sleeve, a cover surface of the top cover being disposed on a top surface of the top housing;
- and a gas output unit connected to bottom surfaces of the first hollow sleeve and the second hollow sleeve, the gas output unit including a first partition plate and a second partition plate, which form a first gas output layer, a second gas output layer and a third gas output layer for outputting the second reaction gas, the first reaction gas and the third reaction gas respectively.
Dependencies are inferred from the claim text.