Method for inspecting a sample using an assembly comprising a scanning electron microscope and a light microscope

Assembly comprising a light microscope and an electron microscope, wherein the assembly comprises a processing unit, wherein the processing unit is provided with a computer program having instructions adapted to perform a method for inspecting a sample with the assembly, wherein the assembly comprises a sample holder for mounting a sample thereon, wherein the sample holder is arranged for inspecting the sample with both the scanning electron microscope and the light microscope, wherein the method comprises the steps of:

• capturing a light microscopy image of the sample in its position for imaging with the scanning electron microscope;
• determining a position and physical dimensions of a region of interest in the sample based on the light microscopy image;
• determining values to which the scanning electron microscope parameters need to be set to image the sample on the sample holder at a desired resolution, wherein said values are at least partially based on the light microscope image;
• and
• capturing a scanning electron microscope image of the region of interest in the sample, wherein the scan settings for recording the scanning electron microscope image are determined from said values and said position and physical dimensions of said region of interest before the scanning electron microscope image is captured.

A non-transitory computer readable medium, having recorded thereon a computer program which, when provided on a processing unit of an assembly comprising a light microscope and an electron microscope, said computer program has instructions to perform a method for inspecting a sample with the assembly, wherein the assembly comprises a sample holder for mounting a sample thereon, wherein the sample holder is arranged for inspecting the sample with both the scanning electron microscope and the light microscope, wherein the method comprises the steps of:

• capturing a light microscopy image of the sample in its position for imaging with the scanning electron microscope;
• determining a position and physical dimensions of a region of interest in the sample based on the light microscopy image;
• determining values to which the scanning electron microscope parameters need to be set to image the sample on the sample holder at a desired resolution, wherein said values are at least partially based on the light microscope image;
• and
• capturing a scanning electron microscope image of the region of interest in the sample, wherein the scan settings for recording the scanning electron microscope image are determined from said values and said position and physical dimensions of said region of interest before the scanning electron microscope image is captured.