Semiconductor fault analysis device and fault analysis method thereof

A semiconductor fault analysis device comprising:

• a measurement device configured to measure electrical data from a semiconductor device included in a semiconductor wafer and to output the measured electrical data as measurement data;
• a first double sampler configured to generate double sampling data based on the measurement data and reference data;
• a classifier configured to perform a fault analysis operation based on the double sampling data and classify a fault type of the semiconductor device based on a result of fault analysis operation;
• and
• an analyzer configured to analyze and output a classification result based on the fault type.

A semiconductor fault analysis device comprising:

• a measurement device configured to receive electrical data from a semiconductor device included in a semiconductor wafer and to output the electrical data as measurement data;
• a simulator configured to generate a simulation for each of a plurality of fault types of the semiconductor device and to measure simulation data based on the simulation;
• a classifier configured to generate a training model by performing pre-training based on the simulation data, perform a fault analysis operation with respect to the measurement data by using the training model, and classify a fault type of the semiconductor device based on the fault analysis operation;
• and
• an analyzer configured to analyze and output a classification result based on the fault type.