US 10,650,510 B2 · Substrate inspection apparatus and method

Abstract

Disclosed are a substrate inspection apparatus and a method for displaying a component in a three-dimensional inspection of a substrate. The substrate inspection apparatus measures a substrate or an inspection target region of interest of the substrate and displays an image of components positioned within the measured region on a display unit. The image of the components displayed on the display unit may be displayed in a predetermined reference direction. The difference between the reference direction and a direction in which the actual component is disposed on the substrate is displayed in the form of a numerical value or a figure. Alternatively, the image of the component in the reference direction and the image of the actually disposed component are simultaneously displayed on a screen, and a user may convert a display method of the image by using a toggle button.

Claims11

Dependent claims

A substrate inspection apparatus comprising:

a substrate transfer device configured to transfer a substrate;
a camera configured to photograph an image of the substrate for inspection;
and
a display device configured to display a first image of a first component among a plurality of components arranged on the substrate in a reference direction of the first component, the first image of the first component being included in the photographed image of the substrate, and the reference direction of the first component being predetermined for displaying the first image of the first component in the display device,
wherein the display device displays a difference between the reference direction of the first component and an actual arrangement direction of the first component.

2 more elements

Dependencies are inferred from the claim text.

Substrate inspection apparatus and method

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Substrate inspection apparatus and method

Life of this patent

Abstract

Claims11