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US 10,649,592 B2Granted
Conductive substrate and method for fabricating conductive substrate
AssigneeSumitomo Metal Mining Co., Ltd.
InventorJunichi Nagata
Life of this patent
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Abstract
A laminated substrate is provided that includes a transparent base material, and a laminated body formed at least one surface of the transparent base material. The laminated body includes a blackened layer containing oxygen, copper, and nickel, and a copper layer. A ratio of the nickel is 11 mass % or more and 60 mass % or less, among the copper and the nickel contained in the blackened layer.
Claims6
A conductive substrate, comprising:
- a transparent base material;
- and
- a metal thin electrode formed on at least one surface of the transparent base material,
- wherein the metal thin electrode includes
- a blackened electrode layer containing oxygen, copper, and nickel;
- and
- a laminated body having a copper electrode layer, and
- a ratio of the nickel is 11 mass % or more and 60 mass % or less among the copper and the nickel contained in the blackened electrode layer, and
- wherein a bottom width (W2) of the metal thin electrode and a pattern width (W1) of the metal thin electrode satisfy a relationship of formula (1):
- (W1−W2)/2W1≤0.075.
7 more elements
A method for fabricating a conductive substrate, comprising:
- a transparent base material preparation process that prepares a transparent base material;
- and
- a laminated body formation process that forms a laminated body on at least one surface of the transparent base material;
- an etching process that forms an electrode pattern by etching the laminated body,
- wherein the laminated body formation process includes
- a copper layer formation step that forms a copper layer by a copper layer formation part that stacks copper, and
- a blackened layer formation step that forms a blackened layer by a blackened layer formation part that stacks a blacked layer containing oxygen, copper, and nickel,
- wherein the blackened layer formation step is carried out under a reduce pressure atmosphere, and a ratio of the nickel is 11 mass % or more and 60 mass % or less among the copper and the nickel contained in the blackened layer, and
- wherein the etching process etches the copper layer and the blacked layer of the laminated substrate, and forms the electrode pattern including a metal thin electrode, which is a laminated body having a copper electrode layer and a blackened electrode layer, and an opening portion is formed by the etching process in the copper layer and the blackened layer, and
- wherein a bottom width (W2) of the metal thin electrode and a pattern width (W1) of the metal thin electrode satisfy a relationship of formula (1):
- (W1−W2)/2W1≤0.075.
8 more elements
Dependencies are inferred from the claim text.