Method and apparatus for pulse gas delivery with isolation valves
AssigneeMKS Instruments, Inc.
InventorsJunhua Ding, Michael L'Bassi, Gordon Hill
Life of this patent
Estimating the term…
Abstract
A fluid control system for pulse delivery of a fluid include a flow channel, an isolation valve to initiate and terminate a pulse of fluid from the flow channel, and a pulse mass flow controller (MFC). The MFC includes a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller to control flow of fluid through the control valve and switching of the isolation valve, to control a mass of fluid delivered during the pulse of fluid. Controlling the flow of fluid through the control valve can be based on feedback from the flow sensor during the pulse initiated and terminated by the isolation valve.
Claims22
A fluid control system for pulse delivery of a fluid, the system comprising:
- a flow channel;
- an isolation valve to initiate and terminate a pulse of fluid from the flow channel;
- and
- a mass flow controller (MFC), including a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a dedicated controller to control flow of fluid through the control valve based on feedback from the flow sensor, the dedicated controller connected to the isolation valve to control switching of the isolation valve to initiate and terminate the pulse, to control a mass of fluid delivered during the pulse of fluid, wherein the dedicated controller is configured to determine an estimated number of moles of fluid delivered as a function of i) the measured flow rate, ii) a start time of the pulse of fluid, and iii) a stop time of the pulse of fluid, and wherein the dedicated controller is configured to control the flow through the control valve and the switching of the isolation valve based on the estimated number of moles of fluid delivered.
A method of delivering a pulse of fluid, the method comprising:
- controlling flow of fluid into a flow channel with a control valve of a mass flow controller (MFC);
- measuring flow rate in the flow channel with a flow sensor of the MFC;
- controlling switching of an isolation valve to initiate and terminate a pulse of fluid from the flow channel;
- and
- with a dedicated controller in the MFC, determining an estimated number of moles of fluid delivered, controlling flow of fluid through the control valve based on feedback from the flow sensor, and switching of the isolation valve to control a mass of fluid delivered during the pulse of fluid, wherein the estimated number of moles of fluid delivered is determined as a function of i) the measured flow rate, ii) a start time of the pulse of fluid, and iii) a stop time of the pulse of fluid, and wherein the flow of fluid through the control valve and the switching of the isolation valve are controlled based on the estimated number of moles of fluid delivered.
A fluid control system for pulse delivery of a fluid, the system comprising:
- a flow channel;
- plural isolation valves to initiate and terminate a pulse of fluid from the flow channel, one of the isolation valves being coupled to a process chamber and another of the isolation valves being coupled to a dump line;
- and
- a mass flow controller (MFC), including a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller to control flow of fluid through the control valve and switching of the isolation valves, to control a mass of fluid delivered during the pulse of fluid.
Dependencies are inferred from the claim text.