Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method

A movable body apparatus that moves an object with respect to a first member, the apparatus comprising:

• a first movable body that holds the object and can move with respect to the first member in a first direction and a second direction intersecting each other;
• a first measurement system in which one of a first grating member and a plurality of first heads is provided at the first movable body, and the other of the first grating member and the plurality of first heads is provided facing the first movable body, the first grating member having a plurality of first grating areas arranged mutually apart in the first direction and a plurality of second grating areas arranged apart from the plurality of first grating areas in the second direction and mutually apart in the first direction, the plurality of first heads each irradiating the first grating member with a measurement beam while moving in the first direction with respect to the first grating member, and the first measurement system measuring position information on the first movable body in the first direction by a head irradiating at least two of the plurality of first grating areas and the plurality of second grating areas with the measurement beam, of the plurality of first heads;
• a second movable body that is provided with the other of the first grating member and the plurality of first heads and can move in the second direction;
• a second measurement system in which one of a second grating member and a second head is provided at the second movable body and the other of the second grating member and the second head is provided facing the second movable body, the second grating member including measurement components in the first direction and the second direction, the second head irradiating the second grating member with a measurement beam, and the second measurement system measuring position information on the second movable body in the second direction;
• and
• a control system which performs movement control of the first movable body, based on the position information measured by the first measurement system and the second measurement system, wherein
• the control system performs movement control of the first movable body, based on position information on the first movable body measured using a head irradiating the plurality of first grating areas and the plurality of second grating areas with the measurement beam, of the plurality of first heads, and grating correction information on the plurality of first grating areas and the plurality of second grating areas.

A moving method, comprising:

• measuring a first position information on a first movable body that holds an object in a first direction with at least three heads of a plurality of first heads that each irradiate a first grating member with a measurement beam while moving in a first direction with respect to the first grating member, the first grating member including measurement components in the first direction and a second direction orthogonal to each other, the first grating member having a plurality of first grating areas arranged mutually apart in the first direction and a plurality of second grating areas arranged apart from the plurality of first grating areas in the second direction and mutually apart in the first direction, and one of the plurality of first heads and the first grating member being provided at the first movable body, the other of the first grating member and the plurality of first heads being provided at a second movable body that can move in the second direction to face the first movable body, and the at least three heads irradiating at least two of the plurality of first grating areas and the plurality of second grating areas with the measurement beams;
• measuring a second position information on the second movable body in the second direction, in which one of a second grating member including measurement components in the first direction and the second direction and a second head irradiating the second grating member with a measurement beam while moving in the second direction with respect to the second grating member is provided at the second movable body, and the other of the second grating member and the second head is provided facing the second movable body;
• performing movement control of the first movable body in directions of three degrees of freedom within a predetermined plane including the first direction and the second direction, based on the first position information and the second position information;
• and
• acquiring grating correction information on at least two of the plurality of first grating areas and the plurality of second grating areas, based on position information on the first movable body measured using at least four heads irradiating the at least two of the plurality of first grating areas and the plurality of second grating areas with the measurement beams, of the plurality of first heads, wherein
• the grating correction information is used in movement control of the first movable body that uses the at least three heads irradiating at least two of the plurality of first grating areas and the plurality of second grating areas with the measurement beams.

A moving method to move an object with respect to a first member, the method comprising:

• moving a first movable body holding the object in a first direction and a second direction intersecting each other with respect to the first member;
• measuring position information on the first movable body in the first direction with a head of a plurality of first heads of a first measurement system, in the first measurement system one of a first grating member and the plurality of first heads being provided at the first movable body, the other of the first grating member and the plurality of first heads being provided facing the first movable body, the first grating member having a plurality of first grating areas arranged mutually apart in the first direction and a plurality of second grating areas arranged apart from the plurality of first grating areas in the second direction and mutually apart in the first direction, the plurality of first heads each irradiating the first grating member with a measurement beam while moving in the first direction with respect to the first grating member, and the head irradiating at least two of the plurality of first grating areas and the plurality of second grating areas with the measurement beam;
• moving the first movable body in the second direction by a second movable body provided with the other of the first grating member and the plurality of first heads;
• measuring position information on the second movable body in the second direction with a second measurement system, in the second measurement system one of a second grating member including measurement components in the first direction and the second direction and a second head irradiating the second grating member with a measurement beam being provided at the second movable body, and the other of the second grating member and the second head being provided facing the second movable body;
• and
• controlling movement of the first movable body, based on the position information measured by the first measurement system and the second measurement system, wherein
• in the controlling, the movement of the first movable body is controlled, based on position information on the first movable body measured using a head irradiating the plurality of first grating areas and the plurality of second grating areas with the measurement beam, of the plurality of first heads, and grating correction information on the plurality of first grating areas and the plurality of second grating areas.