Liquid processing apparatus

A liquid processing apparatus comprising:

• a cup body provided to surround a substrate holder that horizontally holds a substrate;
• a nozzle arm provided with a nozzle in a front end portion thereof and supported by a support at a rear end portion thereof;
• a mover configured to move the nozzle arm via the support between a stand-by position and a processing position where a processing fluid is supplied from the nozzle to the substrate;
• a lift configured to move the support up and down;
• a cover including a top plate covering a driving region where the mover and the lift are disposed and configured to partition the driving region from a region where the substrate is held within the cup body;
• an opening formed in a portion corresponding to a moving path of the support in the top plate so as to allow the support to move therethrough;
• and
• an exhaust configured to evacuate the driving region,
• wherein the nozzle arm is configured to block the opening, the opening being formed in such a size as to accommodate the nozzle arm in the stand-by position.