Resist composition, method of forming resist pattern, compound, and acid generator
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsMasatoshi Arai, Takaya Maehashi, Takuya Ikeda
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsMasatoshi Arai, Takaya Maehashi, Takuya Ikeda
Estimating the term…
A resist composition including a base component which exhibits changed solubility in a developing solution under action of acid, and a compound (B1) having an anion moiety and a cation moiety and being represented by general formula (b1) (wherein R01 to R014 each independently represents a hydrogen atom or a hydrocarbon group which may have a substituent, or two or more of R01 to R014 may be mutually bonded to form a ring structure, provided that at least two of R01 to R014 are mutually bonded to form a ring structure, and at least one of R01 to R014 has an anion group, and the anion moiety as a whole forms an anion having a valency of n; n represents an integer of 1 or more; represents an integer of 1 or more; and Mm+ represents an organic cation having a valency of m).
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid,
A compound having a cation moiety and an anion moiety, represented by general formula (b1) shown below:
Dependencies are inferred from the claim text.