Electro-optic modulators with stacked metal, dielectric, and active layers
AssigneeGlobalfoundries Inc.
InventorsYusheng Bian, Ajey Poovannummoottil Jacob, Abu Thomas
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Abstract
Structures for an electro-optic modulator and methods of fabricating a structure for an electro-optic modulator. The electro-optic modulator is arranged over a portion of a first waveguide core. The electro-optic modulator may include an electrode, an active layer, a second waveguide core, and a dielectric layer that is arranged between the active layer and the second waveguide core. The active layer is composed of a material having a refractive index that is a function of a bias voltage applied between the electrode and the first waveguide core.
Claims20
A structure comprising:
- a first waveguide core;
- and
- an electro-optic modulator arranged over a portion of the first waveguide core, the electro-optic modulator including an electrode, an active layer, a second waveguide core, and a first dielectric layer arranged between the active layer and the second waveguide core,
- wherein the active layer is comprised of a material having a refractive index that is a function of a bias voltage applied between the electrode and the first waveguide core.
A structure comprising:
- a waveguide core;
- an electro-optic modulator arranged over a portion of the waveguide core, the electro- optic modulator including an electrode, an active layer, and a first dielectric layer arranged between the active layer and the waveguide core, and the active layer comprised of a material having a refractive index that is a function of a bias voltage applied between the electrode and the waveguide core;
- and
- one or more second dielectric layers arranged between the active layer and the waveguide core.
A method comprising:
- patterning a single-crystal semiconductor layer to form a first waveguide core;
- and
- forming an electro-optic modulator including an electrode, a second waveguide core, a first dielectric layer, and an active layer that have a stacked arrangement over a portion of the first waveguide core,
- wherein the first dielectric layer is positioned in the stacked arrangement between the active layer and the second waveguide core, and the active layer is comprised of a material having a refractive index that is a function of a bias voltage applied to the electrode and the first waveguide core.
Dependencies are inferred from the claim text.