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US 10,649,240 B2Granted
Vanadium dioxide-based optical and radiofrequency switches
AssigneeWisconsin Alumni Research Foundation
InventorsZhenqiang Ma, Chang-Beom Eom, Jaeseong Lee, Daesu Lee, Sang June Cho, Dong Liu
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Abstract
Switches for electromagnetic radiation, including radiofrequency switches and optical switches, are provided. Also provided are methods of using the switches. The switches incorporate layers of high quality VO2 that are composed of a plurality of connected crystalline VO2 domains having the same crystal structure and orientation.
Claims5
A heterostructure comprising:
- a substrate;
- a layer of VO2 on the substrate, wherein the layer of VO2 and the substrate are joined at an epitaxial interface;
- and
- a layer of single-crystalline silicon bonded to the layer of VO2, such that the layer of VO2 is disposed between the substrate and the layer of single-crystalline silicon, wherein the layer of single-crystalline silicon and the layer of VO2 are not joined at an epitaxial interface.
1 more element
A structure comprising:
- a substrate;
- a layer of VO2, wherein the layer of VO2 comprises a plurality of connected crystalline VO2 domains having the same crystal structure and epitaxial orientation;
- and
- a layer of single-crystalline silicon on a surface of the layer of VO2, wherein the layer of VO2 is disposed between the substrate and the layer of single-crystalline silicon.
1 more element
Dependencies are inferred from the claim text.