Reticle having an illumination device
AssigneeImt Masken Und Teilungen AG
InventorWinfried Arens
Life of this patent
Estimating the term…
Abstract
A reticle includes an illumination device having an optical component configured to introduce light from a light source into the reticle. The optical component has an entrance face and a reflecting face for the light of the light source. Two parallel bounding surfaces that are oriented perpendicular to an optical axis have an optical marking. A peripheral edge joins the bounding surfaces. The optical component is disposed at the peripheral edge of the reticle such that the light of the light source enters the reticle via the entrance face and the reflecting face and impinges on the marking. The entrance face is configured to act as a collecting lens on which the light of the light source impinges divergently.
Claims20
A reticle comprising:
- an illumination device including an optical component configured to introduce light from a light source into the reticle, the optical component having an entrance face and a reflecting face for the light of the light source;
- two parallel bounding surfaces oriented perpendicular to an optical axis and having an optical marking;
- and
- a peripheral edge joining the bounding surfaces, the optical component being disposed at the peripheral edge of the reticle such that the light of the light source enters the reticle via the entrance face and the reflecting face and impinges on the marking,
- wherein the entrance face is configured to act as a collecting lens on which the light of the light source impinges divergently, and
- wherein the entrance face is configured to convert the divergent incident light of the light source into a convergent beam.
An optical device comprising:
- a reticle comprising:
- an illumination device including an optical component configured to introduce light from a light source into the reticle, the optical component having an entrance face and a reflecting face for the light of the light source;
- two parallel bounding surfaces oriented perpendicular to an optical axis and having an optical marking;
- and
- a peripheral edge joining the bounding surfaces, the optical component being disposed at the peripheral edge of the reticle such that the light of the light source enters the reticle via the entrance face and the reflecting face and impinges on the marking,
- wherein the entrance face is configured to act as a collecting lens on which the light of the light source impinges divergently, and
- wherein the marking is disposed at an intermediate image plane of the optical device.
A reticle comprising:
- an illumination device including an optical component configured to introduce light from a light source into the reticle, the optical component having an entrance face and a reflecting face for the light of the light source;
- two parallel bounding surfaces oriented perpendicular to an optical axis and having an optical marking;
- and
- a peripheral edge joining the bounding surfaces, the optical component being disposed at the peripheral edge of the reticle such that the light of the light source enters the reticle via the entrance face and the reflecting face and impinges on the marking,
- wherein the entrance face is configured to act as a collecting lens on which the light of the light source impinges divergently, and
- wherein the entrance face is configured as an aspherical lens or as a Fresnel lens or is provided with a diffractive optic.
Dependencies are inferred from the claim text.