Device for imaging a sample surface
AssigneeWitec Wissenschaftliche Instrumente und Technologie GmbH
InventorsOlaf Hollricher, Wolfram Ibach, Peter Spizig, Detlef Sanchen, Gerhard Volswinkler
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Abstract
A device for imaging the surfaces of a sample having topography with the aid of confocal microscopy, in particular confocal Raman and/or fluorescence microscopy, comprising a first light source, in particular a laser light source for generating excitation radiation, in particular Raman radiation and/or fluorescence radiation and a second light source, wherein the first laser light source emits radiation in a first wavelength range and the second light source emits radiation in a second wavelength range, wherein the first wavelength range and the second wavelength range do not overlap.
Claims6
A device for imaging a surface of a sample having a surface topography, comprising:
- an optical axis;
- an objective lens;
- a light source operably arranged relative to the objective lens to form a substantially punctiform image at a focal plane and to excite a light radiation from the sample;
- a detector operably arranged relative to the objective lens to receive and detect the excited light radiation from the sample;
- a sample table disposed adjacent the objective lens and generally at the focal plane and that movably supports the sample in three orthogonal directions;
- an analysis unit operably connected to the sample table to control a movement of the sample table;
- the analysis unit including a mechanism configured to periodically move the focal plane with a modulation amplitude and period along the optical axis;
- wherein the detector is configured to detect reflected and/or scattered and/or emitted light from the surface as the focal plane is moving and generate a light signal;
- and
- a controller configured to determine a topography of the surface from the light signal and maintain the surface of the sample substantially in the focal plane based on the determined surface topography by adjusting at least one of the sample table, the light source and the objective lens;
- wherein the device is configured to perform a Raman and/or Rayleigh measurement and determine a maximum Raman and/or Rayleigh intensity;
- wherein the modulation amplitude is greater than the highest sample topography and greater than a position of the determined maximum Raman and/or Rayleigh intensity.
Dependencies are inferred from the claim text.