Low Ts wire grid polarizer
AssigneeMoxtek, Inc.
InventorsHua Li, Bin Wang, Brian Bowers
Life of this patent
Estimating the term…
Abstract
A wire grid polarizer (WGP) can have low transmission of a primarily reflected/absorbed polarization (e.g. low Ts). The WGP can comprise an array of wires on a substrate and a stack of thin films between the substrate and the array of wires. The stack of thin films can include a first layer closest to the substrate, a second layer over the first layer, and a third layer over the second layer and closest to the array of wires. An index of refraction of the first layer can be greater than an index of refraction of the substrate, an index of refraction of the second layer can be greater than the index of refraction of the first layer, and an index of refraction of the third layer can be less than the index of refraction of the first layer.
Claims20
A wire grid polarizer (WGP) comprising:
- a substrate having a first face, and a second face opposite of the first face;
- an array of wires on the second face of the substrate with channels between adjacent wires;
- a stack of thin films between the substrate and the array of wires, the stack of thin films including a first layer closest to the substrate, a second layer over the first layer, and a third layer over the second layer and closest to the array of wires, the second layer being sandwiched between the first layer and the third layer;
- a thin film filling the channels and extending over a distal end of the array of wires farther from the substrate, defining a fourth layer;
- a thin film over the fourth layer and located farther from the substrate than the fourth layer, defining a fifth layer;
- and
- the first layer including aluminum oxide;
- the second layer including silicon nitride, hafnium oxide, or combinations thereof;
- the third layer including silicon oxide;
- the fourth layer including silicon oxide;
- and
- the fifth layer including titanium oxide.
A wire grid polarizer (WGP) comprising:
- a substrate having a first face, and a second face opposite of the first face;
- an array of wires on the second face of the substrate with channels between adjacent wires;
- a stack of thin films between the substrate and the array of wires, the stack of thin films including a first layer closest to the substrate, a second layer over the first layer, and a third layer over the second layer and closest to the array of wires, the second layer being sandwiched between the first layer and the third layer;
- an index of refraction of the first layer is greater than an index of refraction of the substrate, an index of refraction of the second layer is greater than the index of refraction of the first layer, and an index of refraction of the third layer is less than the index of refraction of the first layer;
- and
- a thickness of the first layer is between 100 nm and 140 nm, a thickness of the second layer is between 35 nm and 75 nm, and a thickness of the third layer is between 25 nm and 65 nm.
A wire grid polarizer (WGP) comprising:
- a substrate having a first face, and a second face opposite of the first face;
- an array of wires on the second face of the substrate with channels between adjacent wires;
- a stack of thin films between the substrate and the array of wires, the stack of thin films including a first layer closest to the substrate, a second layer over the first layer, and a third layer over the second layer and closest to the array of wires;
- and
- the first layer comprises aluminum oxide, the second layer comprises silicon nitride, and the third layer comprises silicon oxide.
Dependencies are inferred from the claim text.