Coupled multiscale positioning of arrays of parallel, independently actuated and simultaneously driven modular scanning probe microscopes for high-throughput, in-line, nanoscale measurement of flexible, large area, and roll-to-roll processes

A method of metrology for manufacturing comprising:

• providing a structure positioning system that comprises a rigid structure that is supported at each end, wherein the rigid structure is actuated to alter a physical location of the rigid structure in at least two dimensions such that the rigid structure can be positioned relative to a direction of movement of a sample and a distance separating the rigid structure from the sample;
• providing a plurality of scanning probes, wherein each of the plurality of scanning probes is attached to a corresponding fine-z flexure mechanism and each fine-z flexure mechanism is suspended from the rigid structure and actuated by a corresponding actuator, wherein the actuators allow independent movement and positioning of each fine-z mechanism and its associated scanning probe in multiple directions independent of the movement of the rigid structure;
• positioning at least one of the scanning probes in relation to a position and a velocity of a sample by movement of the rigid structure;
• fine positioning the at least one of the plurality of scanning probes in closer proximity to the sample, wherein the fine positioning is performed using the fine-z flexure mechanism of the at least one scanning probe and its corresponding actuator;
• and
• performing metrology on the sample using the at least one scanning probe.

A method of metrology for manufacturing comprising:

• providing a structure positioning system that comprises a rigid structure that is supported at each end, wherein the rigid structure is actuated to alter a physical location of the rigid structure in at least two dimensions such that the rigid structure can be positioned relative to a direction of movement of a sample and a distance separating the rigid structure from the sample, and wherein the rigid structure is moved in multiple directions by one or more XZ actuators;
• providing a plurality of atomic force microscopy (AFM) probes, wherein each of the plurality of AFM probes is attached to a corresponding fine-z flexure mechanism and each fine-z flexure mechanism is suspended from the rigid structure and actuated by a corresponding voice-coil actuator, wherein the voice-coil actuators allow independent movement and positioning of each fine-z mechanism and its associated AFM probe in multiple directions independent of the movement of the rigid structure;
• coarse positioning of one or more of the individually actuated and controlled plurality of AFM probes to within approximately 250 μm of a sample using the one or more XZ actuators to move the rigid structure, wherein at least one of the one or more AFM probes comprise a probe used for metrology data acquisition;
• fine positioning the one or more AFM probes in closer proximity to the sample, wherein fine positioning is performed using the fine-z flexure mechanism of the one or more AFM probes and their corresponding voice-coil actuators;
• and
• performing metrology on the sample using the one or more AFM probes.