Scattered radiation optical scanner

A method, comprising:

• (a) generating a light beam;
• (b) reflecting the light beam through a scan lens towards a transparent sample at an incident angle that is not more than one degree greater or less than Brewster's angle of the transparent sample;
• (c) focusing a scattered light from the transparent sample at an angle that is normal to the plane of incidence of the moving irradiated spot on the transparent sample;
• (d) filtering a first portion of the scattered light from a first surface of the transparent sample while not filtering a second portion of the scattered light from a second surface of the transparent surface;
• (e) measuring the light intensity of the second portion of the scattered light from the second surface of the transparent surface;
• and
• (f) determining if a defect is present on the transparent sample based at least in part on the measured light intensity in (e).

An optical scanning system, comprising:

• a radiating source that outputs a light beam;
• a time varying beam reflector that is configured to reflect the light beam through a scan lens towards a transparent sample at an incident angle that is not more than one degree greater or less than Brewster's angle of the transparent sample;
• a focusing lens configured to be irradiated by light scattered from the transparent sample at an angle that is normal to the plane of incidence of the moving irradiated spot on the transparent sample;
• a first means for measuring the light scattered from the transparent sample;
• and
• a second means for determining if a defect is present on the transparent sample.