Generating high resolution images from low resolution images for semiconductor applications

A system configured to generate a high resolution image for a specimen from one or more low resolution images of the specimen, comprising:

• an imaging subsystem configured for generating one or more low resolution images of a specimen;
• one or more computer subsystems configured for acquiring the one or more low resolution images;
• and
• one or more components executed by the one or more computer subsystems, wherein the one or more components comprise:
• a model, wherein the model comprises:
• one or more first layers configured for generating a representation of the one or more low resolution images;
• and
• one or more second layers configured for generating a high resolution image for the specimen from the representation of the one or more low resolution images, wherein the one or more low resolution images and the high resolution image have different image types, wherein the imaging subsystem is further configured as an optical based imaging subsystem, wherein the optical based imaging subsystem is configured to direct light to specimen and to detect light from the specimen due to illumination of the specimen by the optical based imaging subsystem to thereby generate the one or more low resolution images, and wherein the high resolution image represents design data for the specimen or an image of the specimen generated by a high resolution electron beam system.

A non-transitory computer-readable medium, storing program instructions executable on one or more computer systems for performing a computer-implemented method for generating a high resolution image for a specimen from one or more low resolution images of the specimen, wherein the computer-implemented method comprises:

• acquiring one or more low resolution images of a specimen;
• generating a representation of the one or more low resolution images by inputting the one or more low resolution images into one or more first layers of a model;
• and
• generating a high resolution image for the specimen based on the representation, wherein generating the high resolution image is performed by one or more second layers of the model, wherein the one or more low resolution images and the high resolution image have different image types, wherein the one or more low resolution images are generated by an optical based imaging system, wherein the optical based imaging system is configured to direct light to specimen and to detect light from the specimen due to illumination of the specimen by the optical based imagine system to thereby generate the one or more low resolution images, wherein the high resolution image represents design data for the specimen or an image of the specimen generated by a high resolution electron beam system, wherein said acquiring, said generating the representation, and said generating the high resolution image are performed by one or more computer systems, wherein one or more components are executed by the one or more computer systems, and wherein the one or more components comprise the model.

A computer-implemented method for generating a high resolution image for a specimen from one or more low resolution images of the specimen, comprising:

• acquiring one or more low resolution images of a specimen;
• generating a representation of the one or more low resolution images by inputting the one or more low resolution images into one or more first layers of a model;
• and
• generating a high resolution image for the specimen based on the representation, wherein generating the high resolution image is performed by one or more second layers of the model, wherein the one or more low resolution images and the high resolution image have different image types, wherein the one or more low resolution images are generated by an optical based imaging system, wherein the optical based imaging system is configured to direct light to specimen and to detect light from the specimen due to illumination of the specimen by the optical based imaging system to thereby generate the one or more low resolution images, wherein the high resolution image represents design data for the specimen or an image of the specimen generated by a high resolution electron beam system, wherein said acquiring, said generating the representation, and said generating the high resolution image are performed by one or more computer systems, wherein one or more components are executed by the one or more computer systems, and wherein the one or more components comprise the model.

A system configured to generate a high resolution image for a specimen from one or more low resolution images of the specimen, comprising:

• one or more computer subsystems configured for acquiring one or more low resolution images of a specimen;
• and
• one or more components executed by the one or more computer subsystems, wherein the one or more components comprise:
• a model, wherein the model comprises:
• one or more first layers configured for generating a representation of the one or more low resolution images;
• and
• one or more second layers configured for generating a high resolution image for the specimen from the representation of the one or more low resolution images, wherein the one or more low resolution images and the high resolution image have different image types, wherein the one or more low resolution images are generated by an electron beam based imaging system, wherein the high resolution image represents design data for the specimen, and wherein the design data is information and data that is available prior to printing of the design on any physical specimens.