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US 10,648,864 B2Granted
High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz bessel beam
AssigneeKorea Food Research Institute
InventorsGyeong-Sik Ok, Sung-Wook Choi, Hyun-Joo Chang
Life of this patent
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Abstract
According to one embodiment of the present invention, a terahertz wave concentrating module can comprise: a first lens for changing a terahertz wave, which is emitted while a terahertz Bessel beam penetrates an object to be inspected, so as to have a small angle; and a second lens for concentrating, on a detector, the terahertz wave having passed through the first lens.
Claims6
A high-resolution terahertz wave concentrating module comprising:
- a first lens changing an angle of a terahertz wave radiated when a terahertz Bessel beam is transmitted through an inspection target object, to be smaller;
- and a second lens concentrating the terahertz wave passing through the first lens to a detecting unit,
- wherein the first lens arranged to be symmetrical to a first axicon lens with respect to the inspection target object and, the first axicon lens forming the terahertz Bessel beam is smaller than a wavelength of the terahertz wave generated by a generating unit.
Dependencies are inferred from the claim text.