Substrate distance monitoring
AssigneeApplied Materials, Inc.
InventorsWendell Glenn Boyd, Jr., Govinda Raj
Life of this patent
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Abstract
Embodiments disclosed herein include a faceplate having a sensor assembly, a processing chamber having the same, and a method for monitoring a substrate in a processing chamber. In one embodiment, a faceplate is configured to introduce processing gases into a plasma processing chamber. The faceplate has one or more holes. A sensor assembly is disposed in the one or more holes. The sensor assembly has a sensor and a controller.
Claims20
A faceplate configured to introduce processing gases into a plasma processing chamber, the faceplate comprising:
- a disk shaped body having first holes formed through the body;
- and
- a first sensor assembly disposed in one of the first holes, the first sensor assembly having second holes in the first sensor assembly, the second holes being configured to permit a gas to flow through the second holes and the one of the first holes in which the first sensor assembly is disposed, the first sensor assembly further comprising:
- a sensor configured to provide a metric indicative of a distance defined between a substrate support and the first sensor assembly.
A faceplate configured to introduce processing gases into a plasma processing chamber, the faceplate comprising:
- a disk shaped body;
- a plurality of holes formed through the body;
- and
- a first sensor assembly disposed in one of the plurality of holes, the first sensor assembly comprising:
- a fiber optic based sensor configured to provide a metric indicative of a distance defined between a substrate support and the first sensor assembly.
An apparatus comprising:
- a faceplate comprising a disk shaped body having body holes formed through the body, the faceplate being configured for a semiconductor processing chamber;
- and
- a first sensor assembly comprising:
- a sensor housing engaged with the body in a first body hole of the body holes, the sensor housing having a housing hole, the housing hole being configured to permit a fluid to flow through the housing hole and the first body hole with the sensor housing engaged with the body;
- and
- a sensor disposed in the sensor housing and configured to provide a metric indicative of a distance defined between a surface and the first sensor assembly.
Dependencies are inferred from the claim text.