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US 10,648,587 B2Granted
Diaphragm valve with total valve cavity evacuation
AssigneeEntegris, Inc.
InventorsIraj Gashgaee, George Gonnella, Bruce Garber
Life of this patent
Estimating the term…
Abstract
A fluid valve incorporates a plunger with a fluid channel. The plunger is connected to a boss coupled to a diaphragm, this boss also includes a fluid channel and the plunger and boss fluid channels are in fluid communication. The boss fluid channel opens to the backside of the diaphragm in the valve cavity and permits substantially complete pressurization or evacuation of the volume behind the diaphragm in the valve. The substantially complete pressurization of the volume behind the diaphragm enables full closure of the diaphragm and improves contact of the diaphragm with the valve seat thereby improving performance of the valve.
Claims13
A method of operating a valve comprising:
- applying a fluid force to a backside of a plunger and to a backside of a diaphragm in a diaphragm assembly, said plunger and the backside of the diaphragm are fluidly coupled;
- moving said plunger in a valve assembly cavity, said plunger comprises a plunger cavity formed in a plunger stem, and a plunger fluid flow passage in said plunger, said plunger fluid flow passage fluidly connects an actuation fluid cavity in a valve plate and the plunger cavity;
- moving the diaphragm and the diaphragm assembly in said valve assembly cavity by application of said fluid force to open or close the valve against a valve seat, wherein said diaphragm assembly comprises the diaphragm and a boss, said diaphragm assembly secured between a diaphragm spacer and a fluid block in said valve assembly cavity, said diaphragm assembly fluidly separating said valve cavity in said valve assembly into a process fluid side and an actuation fluid side, said boss coupled to said plunger stem through a passage of the diaphragm spacer, said boss comprises a boss fluid flow passage formed therethrough and that fluidly interconnects an activation fluid cavity, the plunger cavity, and the actuation fluid side of said valve cavity.
A valve comprising:
- a fluid block that comprises a process fluid inlet and a process fluid outlet;
- a valve plate that comprises an actuation fluid cavity;
- and
- a valve assembly disposed in an assembly cavity formed by the fluid block and the valve plate;
- a valve cavity in said assembly cavity, said valve cavity formed between a diaphragm spacer and a valve seat in said assembly cavity;
- a plunger in said assembly cavity, said plunger comprises a plunger cavity formed in a plunger stem, and a plunger fluid flow passage in said plunger, said plunger fluid flow passage fluidly connecting the actuation fluid cavity and the plunger cavity;
- a diaphragm assembly in said assembly cavity, said diaphragm assembly comprises a diaphragm and a boss, said diaphragm assembly secured by said diaphragm spacer and said fluid block in said assembly cavity and fluidly separating said valve cavity into a process fluid side and an actuation fluid side, said boss coupled to said plunger stem through a central passage of the diaphragm spacer, said boss comprises a boss fluid flow passage formed therethrough that provides fluid communication between the activation fluid cavity, the plunger cavity, and an actuation fluid side of said valve cavity.
4 more elements
A valve comprising:
- a valve assembly disposed in an assembly cavity formed between a valve plate and a fluid block, said the fluid block includes an inlet fluid flow passage and an outlet fluid flow passage open to the assembly cavity through a valve seat of the fluid block;
- a valve cavity formed in a portion of the assembly cavity between a diaphragm spacer and the valve seat in the fluid block;
- said valve assembly further comprises a diaphragm assembly, said diaphragm assembly has a diaphragm coupled to a boss, said diaphragm spacer disposed between an upper surface of the diaphragm and a plunger disposed in the assembly cavity, said diaphragm assembly captured and retained in the valve assembly in cooperation with said diaphragm spacer and the fluid block;
- a boss of the diaphragm assembly coupled to a plunger through a central passage of said diaphragm spacer, a stem of the plunger extending through the central passage of said diaphragm spacer and coupled to the boss of the diaphragm assembly;
- a pneumatic cavity disposed in a portion of assembly cavity between the back side of plunger and the valve plate, said pneumatic cavity communicating with a pressure source through the fluid flow passage in the valve plate;
- said plunger comprises a plunger fluid flow passage that provides fluid communication between a plunger cavity formed in the plunger stem and the pneumatic cavity, the boss of said diaphragm assembly comprises a boss fluid flow passage formed therethrough, that includes an opening to the plunger cavity and is fluidly connected to an opening in the boss that is in fluid communication with the back side of the diaphragm whereby actuating fluid communicates between the plunger cavity and an actuation fluid side of the valve cavity.
3 more elements
Dependencies are inferred from the claim text.