Valve with built-in orifice, and pressure-type flow rate control device
AssigneeFujikin Incorporated
InventorsYohei Sawada, Kaoru Hirata, Masaaki Nagase, Kouji Nishino, Nobukazu Ikeda
Life of this patent
Estimating the term…
Abstract
A valve with a built-in orifice includes a base section having a housing recess and first and second flow passages; a valve seat body; an inner disc; a valve element; and an orifice body, wherein the housing recess has a wide-diameter section and a narrow-diameter section, the first flow passage is connected to a space between a wall surface of the narrow-diameter section and the orifice body to communicate with a valve chamber, and the second flow passage communicates with the valve chamber through a through hole of the orifice body and a through hole of the valve seat body.
Claims11
A valve with a built-in orifice, internally having an orifice, comprising:
- a base section having a top-opening housing recess, a first gas flow passage opening to a wall surface of the housing recess, and a second gas flow passage opening to a bottom surface of the housing recess;
- a valve seat body having an annular valve seat and a through-hole formed on an inner side of the valve seat;
- an inner disc for holding and securing the valve seat body;
- a valve element configured to capable of coming in and out of contact with the valve seat;
- and
- an orifice body having a through-hole including the orifice, wherein
- the housing recess is a stepped recess having a wide-diameter section and a narrow-diameter section opening to a bottom surface of the wide-diameter section, the wide-diameter section includes a valve chamber defined by the valve seat body, the inner disc, and the valve element, and the narrow-diameter section has inserted therein the orifice body;
- the valve seat body is mounted on the orifice body, and is pressed by the inner disc and thereby held and secured on top of the orifice body;
- and
- the first gas flow passage communicates with the valve chamber through a space between a wall surface of the narrow-diameter section and the orifice body, and the second gas flow passage communicates with the valve chamber through the through-hole of the orifice body and the through-hole of the valve seat body.
Dependencies are inferred from the claim text.