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US 10,648,463 B2Granted
Gas control device
AssigneeMurata Manufacturing Co., Ltd.
InventorAtsuhiko Hirata
Life of this patent
Estimating the term…
Abstract
A gas control device (100) includes a first pump (101), a second pump (201), a first check valve (102), a second check valve (202), and a receptacle (9). The volume of the receptacle (9) changes in accordance with the pressure of air flowing thereinto. The first pump (101) has an air suction hole (53) and an air discharge hole (24). The second pump (201) has an air suction hole (197) and an air discharge hole (181). The first pump (101) is a type of pump having a high discharge flow rate and a low discharge pressure. The second pump (201) is a type of pump having a low discharge flow rate and a high discharge pressure. The suction hole (53) of the first pump (101) communicates with a first ventilation hole (106). The suction hole (197) of the second pump (201) communicates with a second ventilation hole (107).
Claims21
A gas control device comprising:
- a first pump having a first suction hole and a first discharge hole for a gas;
- and
- a second pump having a second suction hole and a second discharge hole for the gas,
- wherein the gas control device is adapted so that a maximum flow rate of the gas discharged by the first pump from the first discharge hole is greater than a maximum flow rate of the gas discharged by the second pump from the second discharge hole;
- a maximum pressure of the gas discharged by the second pump from the second discharge hole is greater than a maximum pressure of the gas discharged by the first pump from the first discharge hole;
- the first discharge hole and the second discharge hole are connected to a receptacle having a volume changed in accordance with a pressure of the gas flowing into the receptacle;
- and
- the second pump includes:
- a piezoelectric element serving as an actuator,
- a vibrating plate, wherein the vibrating plate has a first main surface bonded to the piezoelectric element, and bends and vibrates due to the piezoelectric element expanding and contracting,
- a frame plate surrounding a periphery of the vibrating plate,
- a connecting portion connecting the vibrating plate to the frame plate and elastically supporting the vibrating plate on the frame plate, and
- a plate opposing a second main surface of the vibrating plate on a side opposite from the first main surface and having a ventilation hole provided.
10 more elements
A gas control device comprising:
- a first pump having a first suction hole and a first discharge hole for a gas;
- and
- a second pump having a second suction hole and a second discharge hole for the gas,
- wherein the gas control device is adapted so that a maximum flow rate of the gas discharged by the first pump from the first discharge hole is greater than a maximum flow rate of the gas discharged by the second pump from the second discharge hole;
- a maximum pressure of the gas discharged by the second pump from the second discharge hole is greater than a maximum pressure of the gas discharged by the first pump from the first discharge hole;
- the first discharge hole and the second discharge hole are connected to a receptacle having a volume changed in accordance with a pressure of the gas flowing into the receptacle;
- the first pump includes:
- a piezoelectric element serving as an actuator,
- a vibrating plate, wherein the vibrating plate has a first main surface bonded to the piezoelectric element, and bends and vibrates due to the piezoelectric element expanding and contracting,
- a first housing bonded to the vibrating plate and forming a pump chamber along with the vibrating plate, and
- a second housing covering the first housing with a gap provided between the first housing and the second housing and forming a ventilation channel between the first housing and the second housing;
- a ventilation hole for allowing the interior and the exterior of the pump chamber to communicate is provided in the first housing;
- and
- the discharge hole is provided in a region of the second housing opposing the ventilation hole.
11 more elements
A gas control device comprising:
- a first pump having a first suction hole for a gas;
- and
- a second pump having a second suction hole for the gas,
- wherein the gas control device is adapted so that a maximum flow rate of the gas suctioned by the first pump is greater than a maximum flow rate of the gas suctioned by the second pump;
- a maximum pressure of the gas suctioned by the second pump is greater than a maximum pressure of the gas suctioned by the first pump;
- the first pump and the second pump are connected to a receptacle having a volume changed in accordance with a pressure of the gas remaining in the receptacle;
- and
- the second pump includes:
- a piezoelectric element serving as an actuator,
- a vibrating plate, wherein the vibrating plate has a first main surface bonded to the piezoelectric element, and bends and vibrates due to the piezoelectric element expanding and contracting,
- a frame plate surrounding a periphery of the vibrating plate,
- a connecting portion connecting the vibrating plate to the frame plate and elastically supporting the vibrating plate on the frame plate, and
- a plate opposing a second main surface of the vibrating plate on a side opposite from the first main surface and having a ventilation hole provided.
10 more elements
A gas control device comprising:
- a first pump having a first suction hole for a gas;
- and
- a second pump having a second suction hole for the gas,
- wherein the gas control device is adapted so that a maximum flow rate of the gas suctioned by the first pump is greater than a maximum flow rate of the gas suctioned by the second pump;
- a maximum pressure of the gas suctioned by the second pump is greater than a maximum pressure of the gas suctioned by the first pump;
- the first pump and the second pump are connected to a receptacle having a volume changed in accordance with a pressure of the gas remaining in the receptacle;
- the first pump includes:
- a piezoelectric element serving as an actuator,
- a vibrating plate, wherein the vibrating plate has a first main surface bonded to the piezoelectric element, and bends and vibrates due to the piezoelectric element expanding and contracting,
- a first housing bonded to the vibrating plate and forming a pump chamber along with the vibrating plate, and
- a second housing covering the first housing with a gap provided between the first housing and the second housing and forming a ventilation channel between the first housing and the second housing;
- a ventilation hole for allowing the interior and the exterior of the pump chamber to communicate is provided in the first housing;
- and
- a discharge hole is provided in a region of the second housing opposing the ventilation hole.
11 more elements
Dependencies are inferred from the claim text.